High-bandwidth nano-positioning stages (NPSs) have boosted the advancement of modern ultra-precise, ultra-fast measurement and manufacturing technologies owing to their fast dynamic response, high stiffness and nanoscale resolution. However, the nonlinear actuation, lightly damped resonance and multi-axis cross-coupling effect bring significant challenges to the design, modeling and control of high-bandwidth NPSs. Consequently, numerous advanced works have been reported over the past decades to address these challenges. Here, this article provides a comprehensive review of high-bandwidth NPSs, which covers four representative aspects including mechanical design, system modeling, parameters optimization and high-bandwidth motion control. Besides, representative high-bandwidth NPSs applied to atomic force microscope and fast tool servo are highlighted. By providing an extensive overview of the design procedure for high-bandwidth NPSs, this review aims to offer a systemic solution for achieving operation with high speed, high accuracy and high resolution. Furthermore, remaining difficulties along with future developments in this fields are concluded and discussed.

Parts with high-quality freeform surfaces have been widely used in industries, which require strict quality control during the manufacturing process. Among all the industrial inspection methods, contact measurement with coordinate measuring machines or computer numerical control machine tool is a fundamental technique due to its high accuracy, robustness, and universality. In this paper, the existing research in the contact measurement field is systematically reviewed. First, different configurations of the measuring machines are introduced in detail, which may have influence on the corresponding sampling and inspection path generation criteria. Then, the entire inspection pipeline is divided into two stages, namely the pre-inspection and post-inspection stages. The typical methods of each sub-stage are systematically overviewed and classified, including sampling, accessibility analysis, inspection path generation, probe tip radius compensation, surface reconstruction, and uncertainty analysis. Apart from those classical research, the applications of the emerging deep learning technique in some specific tasks of measurement are introduced. Furthermore, some potential and promising trends are provided for future investigation.