Friction

ISSN 2223-7690 e-ISSN 2223-7704 CN 10-1237/TH
Editor-in-Chief: Jianbin Luo
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Keyword: material removal mechanism
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Open Access Research Article
Novel three-body nano-abrasive wear mechanism
Ruling CHEN, Shaoxian LI
https://doi.org/10.1007/s40544-020-0481-1
Published: 27 February 2021
2022, 10 (5): 677-687
Downloads: 21 | Views: 699 | PDF (2.6 MB)
Open Access Research Article
Chemically-induced active micro-nano bubbles assisting chemical mechanical polishing: Modeling and experiments
Lei XU, Kihong PARK, Hong LEI, [...], Pengzhan LIU, Eungchul KIM, Yeongkwang CHO, Taesung KIM, Chuandong CHEN << Fewer
https://doi.org/10.1007/s40544-022-0668-8
Published: 25 March 2023
2023, 11 (9): 1624-1640
Downloads: 13 | Views: 382 | PDF (4.9 MB)
Open Access Research Article
Material removal mechanism of copper chemical mechanical polishing with different particle sizes based on quasi-continuum method
Aibin ZHU, Dayong HE, Shengli HE, Wencheng LUO
https://doi.org/10.1007/s40544-017-0142-1
Published: 07 March 2017
2017, 5 (1): 99-107
Downloads: 14 | Views: 491 | PDF (2.7 MB)
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