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The integrated perception capable of detecting and monitoring varieties of activities is one of the ultimate purposes of wearable electronics and intelligent robots. Limited by the space occupation, it lacks practical feasibility to stack multiple types of single sensors on each other. Herein, a high-sensitivity dual-function capacitive sensor with proximity sensing and pressure sensing is proposed. The fringing electric field can be confined in the proximity-sensitive area by fibrous loop-patterned electrode, leading to more stolen charges when object approaching and thus a high proximity sensitivity. The high-permittivity doped structured dielectric layer reduces the compressive stiffness and enhances the rate of compression-caused increase in the equivalent relative permittivity of the dielectric layer, resulting in a larger increase in capacitance and thus a high pressure sensitivity. The electrodes and dielectric layer together compose the capacitor and act as the sensor without taking up additional space. The decoupling of proximity-sensing and pressure-sensing modes can be achieved by decrease or increase in capacitance. Combined with array distribution and sequential scanning, the sensors can be used for detection of motion trajectory, contour recognition, and pressure distribution.

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Publication history
Copyright
Acknowledgements

Publication history

Received: 21 August 2022
Revised: 04 November 2022
Accepted: 08 November 2022
Published: 04 February 2023
Issue date: May 2023

Copyright

© Tsinghua University Press 2022

Acknowledgements

Acknowledgements

This work was supported by the National Key Research and Development Program of China (No. 2021YFB2011500), the National Natural Science Foundation of China (Nos. 52025055 and 51905415), Institutional Foundation of The First Affiliated Hospital of Xi’an Jiaotong University, the China Gas Turbine Establishment of Aero Engine Corporation of China (No. GJCZ-2019-0039), the National Postdoctoral Program for Innovative Talents (No. BX20180251), Young Talent Fund of University Association for Science and Technology in Shaanxi, China (No. 20200404), Basic Research Program of Natural Science of Shaanxi Province of China (Nos.2019JLM-5 and 2021JLM-42), and Shaanxi University Youth Innovation Team.

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