Multicationic nitrides are emerging as a new class of high-performance electrode materials for micro-supercapacitors (MSCs), yet their synthesis and structural control remain challenging. Here, we report the fabrication of VWN nanolaminates using reactive magnetron sputtering deposition method. The deposition pressure and Ar/N2 ratio are systematically tuned to optimize morphology and electrochemical performance. The 100 nm resulting films, composed of alternating 2 nm-thick VN and W2N layers, achieve a high volumetric capacitance of 1400 F·cm−3 at 5 mV·s−1 in 1 mol/L KOH, among the best reported multicationic materials for MSCs. We demonstrate that preferred-oriented nanolaminate growth and interface stabilization occur when VN is used as the initial layer, with a critical VN layer thickness of ≤50 nm. Structural characterization via TEM and XRD reveals the formation of a cubic Fm
Publications
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Open Access
Issue
Journal of Materiomics 2026, 12(5)
Published: 01 July 2026
Total 1
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