Transparent conducting oxides are increasingly important for optoelectronic and thin film transistor applications. La doped BaSnO3 is a strong candidate for its high transparency, high carrier concentration, high mobility and abundancy. However, due to the lack of lattice-matched substrates, the mobility of La:BaSnO3 remains inferior to single crystals. Here, by constructing a novel approach via delta doping La:BaSnO3 in a BaSnO3/La:BaSnO3/BaSnO3 (BSO/LBSO/BSO) heterostructure, we achieved room temperature mobility enhancement up to 110 cm2⸱V−1⸱s−1 while keeping the high carrier concentration at 5 × 1020 cm−3, reaching to the highest electrical conductivity in BaSnO3 based systems. The mobility is enhanced more than 100% compared to our La:BaSnO3 films, which is among the highest mobility in BaSnO3 based films and heterostructures. From atomic structural investigations, we found that both (1) the carrier confinement due to delta doping and (2) dislocation-free La:BaSnO3 conducting channel, revealed by atomic resolution scanning transmission electron microscopy (STEM) studies, are responsible for mobility enhancement. The enhanced mobility from heterostructure approach is widely applicable for transparent electrodes and high current thin film transistor applications.
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Open Access
Research paper
Issue
Journal of Materiomics 2025, 11(5)
Published: 13 March 2025
Total 1
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