Diamond offers great promise as a solution to some of the limitations of current state of the art semiconductor technologies. Yet, significant challenges associated with the doping process remain a primary impediment to the development of diamond-based electronic devices. At present, it is unclear which simple measurement methods are needed to evaluate the diamond doping process. We propose non-destructive inspection methods for evaluating the polycrystalline chemical vapor deposition (CVD) diamond doping process, by analyzing the wettability, optical absorption, photoluminescence emission spectroscopy and atmospheric scanning electron microscope (Air-SEM) tests. Our results show that the properties of the measured samples are distinctly changed due to the presence of the doping elements, thereby confirming the effectiveness of these non-destructive methods for the diamond production industry.
Publications
- Article type
- Year
- Co-author
Article type
Year
Open Access
Research Article
Issue
AIMS Materials Science 2023, 10(4): 710-724
Published: 15 August 2023
Downloads:1
Total 1
京公网安备11010802044758号