We proposed the analytical models to analyze shifts in threshold voltage and drain induced barrier lowering (DIBL) when the stacked SiO2/high-k dielectric was used as the oxide film of Junctionless Cylindrical Surrounding Gate (JLCSG) MOSFET. As a result of comparing the results of the presented model with those of TCAD, it was a good fit, thus proving the validity of the presented model. It could be found that the threshold voltage increased, but DIBL decreased by these models as the high-k dielectric constant increased. However, the shifts of threshold voltage and DIBL significantly decreased as the high-k dielectric constant increased. As for the degree of reduction, the channel length had a greater effect than the thickness of the high-k dielectric, and the shifts of threshold voltage and DIBL were kept almost constant when the high-k dielectric constant was 20 or higher. Therefore, the use of dielectrics such as HfO2/ZrO2, La2O3, and TiO2 with a dielectric constant of 20 or more for stacked oxide will be advantageous in reducing the short channel effect. In conclusion, these models were able to sufficiently analyze the threshold voltage and DIBL.
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Open Access
Research Article
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Open Access
Research Article
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An analytical SS model is presented to observe the subthreshold swing (SS) of a junctionless gate-all-around (GAA) FET with ferroelectric in this paper. For the gate structure, a multilayer structure of metal-ferroelectric-metal-insulator-semiconductor (MFMIS) was used, and the SS was calculated in
Open Access
Research Article
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An analytical subthreshold swing (SS) model has been presented to determine the SS of an elliptic junctionless gate-all-around field-effect transistor (GAA FET). The analysis of a GAA FET with an elliptic cross-section is essential because it is difficult to manufacture a GAA FET with an accurate circular cross-section during the process. The SS values obtained using the proposed SS model were compared with 2D simulation values and other papers to confirm good agreement. Using this analytical SS model, SS was analyzed according to the eccentricity of the elliptic cross-section structure. As a result, it was found that the carrier control ability within the channel improved as the eccentricity increased due to a decrease in the effective channel radius by a decrease in the minor axis length and a decrease in the minimum potential distribution within the channel, and thus the SS decreased. There was no significant change in SS until the eccentricity increased to 0.75 corresponding to the aspect ratio (AR), the ratio of the minor and major axis lengths, of 1.5. However, SS significantly decreased when the eccentricity increased to 0.87 corresponding to AR = 2. As a result of the SS analysis for changes in the device parameters of the GAA FET, changes in the channel length, radius, and oxide film thickness significantly affected the changing rate of SS with eccentricity.
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