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High-performance (K,Na)NbO3-based multilayer piezoelectric ceramic actuators with nickel inner electrodes
Journal of Advanced Ceramics 2023, 12 (6): 1228-1237
Published: 05 June 2023
Downloads:351

Multilayer ceramic actuator (MLCA) has been widely employed in actuators due to the large cumulative displacement under the low driving voltage. In this work, the MLCA devices consisting of a lead-free MnCO3- and CuO-doped 0.96(K0.48Na0.52)(Nb0.96Ta0.04)O3–0.04CaZrO3 piezoelectric ceramics and a base nickel (Ni) metal inner electrode were well co-fired by the two-step sintering process in a reducing atmosphere. The ceramic layer/electrode interface is well-integrated and clearly continuous without distinct interdiffusion and chemical reaction, which is beneficial to the electrical reliability of the MLCA. As a result, the MLCA laminated with nine active ceramic layers obtains an ultrahigh piezoelectric coefficient d33 of 3157 pC/N, about 9 times than bulk ceramics. The 0.5 mm-thick MLCA composed of a series of ~50 μm-thick ceramic layers and ~3 μm-thick Ni electrodes reaches a high 1.8 μm displacement under the low applied voltage of 200 V (the same displacement requires a voltage as high as 3700 V for ~1 mm-thick bulk ceramics). The excellent electrical performance and low-cost base electrode reveal that the (K,Na)NbO3 (KNN)-based MLCAs are promising lead-free candidate for actuator application.

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