Nano Research

ISSN 1998-0124 e-ISSN 1998-0000 CN 11-5974/O4
Editors-in-Chief: Yadong Li, Shoushan Fan
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Keyword: optical emission spectroscopy(OES)
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Research Article
Optical emission spectroscopy diagnosis of energetic Ar ions in synthesis of SiC polytypes by DC arc discharge plasma
https://doi.org/10.1007/s12274-017-1764-3
Published: 02 February 2018
2018, 11 (3): 1470-1481
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