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Research Article | Open Access

Nondestructive direct photolithography of colloidal quantum dots enabled by benzophenone-based crosslinkers

Zhixin Zhai1,§Chang Gu2,3,§ ( )Wenxuan Wang2,3Hao Tan2,3Changfeng Han2,3Ting Zhang2,3 ( )Chaoyu Xiang2,3 ( )
School of Materials Science and Chemical Engineering, Ningbo University, Ningbo 315211, China
Laboratory of Optoelectronic Information Technology and Devices, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China
Hangzhou Bay Laboratory of Advanced Nano-Optoelectronic Materials and Devices, Qianwan Institute of CNITECH, Ningbo 315336, China

§ Zhixin Zhai and Chang Gu contributed equally to this work.

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Abstract

Quantum dot light-emitting diodes (QLEDs) have emerged as a leading platform for next-generation display technologies, gaining substantial research attention in recent years. Among various patterning strategies, direct photolithography offers distinct advantages through its high resolution, throughput, and process simplicity. However, current direct photolithography approaches face critical limitations in resolution and device performance, primarily arising from surface defect generation and photodamage of quantum dots (QDs) caused by deep-ultraviolet exposure and photochemical byproducts. To overcome these challenges, we present a novel benzophenone-derived photosensitive crosslinker featuring a byproduct-free C–H insertion mechanism with native ligands of QDs. Through precise structure design, the photo-absorption of the crosslinker extends to 365 nm, allowing the long-awaited QD patterning under standard i-line photolithography conditions. The developed crosslinker achieves unprecedented patterning resolution (pixel size ≈ 500 nm) with preserved photoluminescent characteristics. Corresponding QLED devices demonstrate remarkable performance enhancements, including a maximum external quantum efficiency (EQE) of 16.48% and a T95 operational lifetime of 2258.3 h (approximately 2.1 times longer than pristine devices). These advancements establish a promising pathway toward high-resolution and high-performance QLEDs, thereby accelerating the commercialization of high-end optoelectronic devices.

Graphical Abstract

A benzophenone-based photosensitive crosslinker capable of achieving submicron-scale patterning under i-line photolithography without performance degradation was developed. The resulting crosslinked devices exhibited significantly enhanced electroluminescent performance compared to conventional counterparts.

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Nano Research
Article number: 94907980

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Cite this article:
Zhai Z, Gu C, Wang W, et al. Nondestructive direct photolithography of colloidal quantum dots enabled by benzophenone-based crosslinkers. Nano Research, 2025, 18(9): 94907980. https://doi.org/10.26599/NR.2025.94907980
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Received: 10 June 2025
Revised: 06 August 2025
Accepted: 23 August 2025
Published: 09 September 2025
© The Author(s) 2025. Published by Tsinghua University Press.

This is an open access article under the terms of the Creative Commons Attribution 4.0 International License (CC BY 4.0, https://creativecommons.org/licenses/by/4.0/).