Sensing-in-Energy microdevice for high-g shock via supercapacitor-wrapped inertial switch

Driven by “More than Moore”, miniaturization and multifunctional integration of micro-energy devices are emerging as critical pathways for next-generation compact microsystems. This study proposes a sensing-in-Energy (SiE) microdevice that immerses an inertial switch in a parallel-connected supercapacitor’s electrolyte, enabling simultaneous impact sensing and stable energy supply under extremely high gravitational acceleration (high-g) shocks (over 10,000 g). The SiE microdevice can be viewed as a high-amplitude shock sensor (raw signal peak > 50 mV) under high-frequency perspective, and a shock-resistant electrochemical power source (voltage fluctuation < 2%) under low-frequency perspective, while energy consumption reduces over 99.9% compared with conventional high-g sensor due to its event-driven mechanism. Sensing performance is boosted > 50% using multiphysics model combined with machine learning algorithm. Furthermore, a fuze microsystem was built based on SiE microdevice, achieving 150 μs-level ultrafast response. Three-layer penetration experiments have verified the engineering application of SiE microdevice and its fuze microsystem in smart munitions domains, providing a novel paradigm for heterogeneous microsystem in high-dynamic environments.