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Paper | Open Access

Laser patterning of large-scale perovskite single-crystal-based arrays for single-mode laser displays

Wangqi Mao1,2, Haonan Li2, Bing Tang3, Chi Zhang4 , Liang Liu5, Pei Wang1, Hongxing Dong2,4 ( ), Long Zhang1,2,4( )
Department of Optics and Optical Engineering, University of Science and Technology of China, Hefei, Anhui 230026, People’s Republic of China
Key Laboratory of Materials for High-Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, People’s Republic of China
Department of Materials Science and Engineering, and Centre for Functional Photonics (CFP), City University of Hong Kong, Hong Kong Special Administrative Region of China 999077, People’s Republic of China
School of Physics and Optoelectronic Engineering, Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou, Zhejiang 310024, People’s Republic of China
Key Laboratory for Micro/Nano Physics and Technology of Hunan Province, State Key Laboratory of Chemo/Biosensing and Chemometrics, College of Materials Science and Engineering, Hunan University, Changsha 410082, People’s Republic of China
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Abstract

Lead halide perovskites have attracted considerable attention as potential candidates for high-performance nano/microlasers, owing to their outstanding optical properties. However, the further development of perovskite microlaser arrays (especially based on polycrystalline thin films) produced by the conventional processing techniques is hindered by the chemical instability and surface roughness of the perovskite structures. Herein, we demonstrate a laser patterning of large-scale, highly crystalline perovskite single-crystal films to fabricate reproducible perovskite single-crystal-based microlaser arrays. Perovskite thin films were directly ablated by femtosecond-laser in multiple low-power cycles at a minimum machining line width of approximately 300 nm to realize high-precision, chemically clean, and repeatable fabrication of microdisk arrays. The surface impurities generated during the process can be washed away to avoid external optical loss due to the robustness of the single-crystal film. Moreover, the high-quality, large-sized perovskite single-crystal films can significantly improve the quality of microcavities, thereby realizing a perovskite microdisk laser with narrow linewidth (0.09 nm) and low threshold (5.1 μJ/cm2). Benefiting from the novel laser patterning method and the large-sized perovskite single-crystal films, a high power and high color purity laser display with single-mode microlasers as pixels was successfully fabricated. Thus, this study may offer a potential platform for mass-scale and reproducible fabrication of microlaser arrays, and further facilitate the development of highly integrated applications based on perovskite materials.

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International Journal of Extreme Manufacturing
Article number: 045001

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Cite this article:
Mao W, Li H, Tang B, et al. Laser patterning of large-scale perovskite single-crystal-based arrays for single-mode laser displays. International Journal of Extreme Manufacturing, 2023, 5(4): 045001. https://doi.org/10.1088/2631-7990/acf2d0

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Received: 05 February 2023
Revised: 09 May 2023
Accepted: 21 August 2023
Published: 06 September 2023
© 2023 The Author(s).

Original content from this work may be used under the terms of the Creative Commons Attribution 4.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.