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Multi-edge extended X-ray absorption fine structure (EXAFS) spectroscopy combined with reverse Monte Carlo (RMC) simulations was used to probe the details of element-specific local coordinations and component-dependent structure relaxations in single crystalline equiatomic CrMnFeCoNi high-entropy alloy as a function of the annealing temperature. Two representative states, namely a high-temperature state, created by annealing at 1373 K, and a low-temperature state, produced by long-term annealing at 993 K, were compared in detail. Specific features identified in atomic configurations of particular principal components indicate variations in the local environment distortions connected to different degrees of compositional disorder at the chosen representative temperatures. The detected changes provide new atomistic insights and correlate with the existence of kinks previously observed in the Arrhenius dependencies of component diffusion rates in the CrMnFeCoNi high-entropy alloy.
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