Reliable and broad-range layer identification of Au-assisted exfoliated large area MoS₂ and WS₂ using reflection spectroscopic fingerprints

The emerging Au-assisted exfoliation technique enables the production of a wealth of large-area and high-quality ultrathin two dimensional (2D) crystals. Fast, damage-free, and reliable determination of the layer number of such 2D films can greatly promote layer-dependent physical studies and device applications. Here, an optical method has been developed for simple, high throughput, and accurate determination of the layer number for Au-assisted exfoliated MoS₂ and WS₂ films in a broad thickness range. The method is based on quantitative analysis of layer-dependent white light reflection spectra (WLRS), revealing that the intensity of exciton-induced reflection peaks can be used as a clear indicator for identifying the layer number. The simple yet robust method will facilitate fundamental studies on layer-dependent optical, electrical, and thermal properties and device applications of 2D materials. The technique can also be readily combined with photoluminescence (PL) and Raman spectroscopies to study other layer-dependent physical properties of 2D materials.