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Research Article

Ultrahigh sensitive near-infrared photodetectors based on MoTe2/germanium heterostructure

Wenjie Chen1,2Renrong Liang1,2( )Shuqin Zhang1,2Yu Liu1,2Weijun Cheng1,2Chuanchuan Sun3Jun Xu1,2( )
Institute of Microelectronics, Tsinghua University, Beijing 100084, China
Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China
Beijing Institute of Control Engineering, Beijing 100084, China
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Abstract

The efficient near-infrared light detection of the MoTe2/germanium (Ge) heterojunction has been demonstrated. The fabricated MoTe2/Ge van der Waals heterojunction shows excellent photoresponse performances under the illumination of a 915 nm laser. The photoresponsivity and specific detectivity can reach to 12,460 A/W and 3.3 × 1012 Jones, respectively. And the photoresponse time is 5 ms. However, the MoTe2/Ge heterojunction suffers from a large reverse current at dark due to the low barrier between MoTe2 and Ge. Therefore, to reduce the reverse current, an ultrathin GeO2 layer deposited by ozone oxidation has been introduced to the MoTe2/Ge heterojunction. The reverse current of the MoTe2/GeO2/Ge heterojunction at dark was suppressed from 0.44 μA/μm2 to 0.03 nA/μm2, being reduced by more than four orders of magnitude. The MoTe2/Ge heterojunction with the GeO2 layer also exhibits good photoresponse performances, with a high responsivity of 15.6 A/W, short response time of 5 ms, and good specific detectivity of 4.86 × 1011 Jones. These properties suggest that MoTe2/Ge heterostructure is one of the promising structures for the development of high performance near-infrared photodetectors.

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Nano Research
Pages 127-132

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Cite this article:
Chen W, Liang R, Zhang S, et al. Ultrahigh sensitive near-infrared photodetectors based on MoTe2/germanium heterostructure. Nano Research, 2020, 13(1): 127-132. https://doi.org/10.1007/s12274-019-2583-5
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Received: 11 September 2019
Revised: 13 November 2019
Accepted: 27 November 2019
Published: 09 December 2019
© Tsinghua University Press and Springer-Verlag GmbH Germany, part of Springer Nature 2019