Nano Research

ISSN 1998-0124 e-ISSN 1998-0000 CN 11-5974/O4
Editors-in-Chief: Yadong Li, Shoushan Fan
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Keyword: anisotropic etching
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Research Article
Multi-stage anisotropic etching of two-dimensional heterostructures
https://doi.org/10.1007/s12274-022-4193-x
Published: 01 April 2022
2022, 15 (6): 4909-4915
Downloads: 83 | Views: 866 | PDF (6.4 MB)
Research Article
Precise control of graphene etching by remote hydrogen plasma
https://doi.org/10.1007/s12274-018-2192-8
Published: 15 September 2018
2019, 12 (1): 137-142
Downloads: 48 | Views: 523 | PDF (746.6 KB)
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