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Friction
ISSN 2223-7690
e-ISSN 2223-7704
CN 10-1237/TH
Editor-in-Chief: Jianbin Luo
Open Access
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Keyword:
slurry flow
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Research Article
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nanosheets as slurry abrasives for chemical-mechanical planarization of copper
Xingliang HE, Yunyun CHEN, Huijia ZHAO,
[...],
Haoming SUN, Xinchun LU,
Hong LIANG
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https://doi.org/10.1007/s40544-013-0017-z
Published: 20 July 2013
2013, 1 (4): 327-332
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