Microsphere phase transmission analysis in microsphere-assisted interferometry lift mode

Microsphere-assisted microscopy (MAM) is a technique aimed at enhancing the lateral resolution of optical microscopy, enabling high lateral resolution profile measurement when combined with interferometry. MAM can operate in lift mode, facilitating the selection of regions of interest and expanding the field of view. The analysis of the lifting mode of microspheres in microsphere-assisted interferometry is still insufficient, which affects the longitudinal measurement accuracy of microsphere-assisted interferometry. The phase transmission mechanism of the microsphere was simulated in this paper, and the relationship between the phase distribution below the microsphere and the distance between the microsphere and the sample was summarized. A combined system of microsphere-assisted white light interference microscope was constructed, and the magnification factor and phase distribution of the microsphere in lift mode was measured through atomic force microscope atomic force microscope (AFM) control of the microsphere’s position. The experiment validated the simulated results of microsphere phase transmission, providing a theoretical foundation for microsphere-assisted interferometry(MAI) in lift mode.