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Research Article | Open Access | Just Accepted

Submillimeter-scale atomic-thin metallic MoO2 with noble metal-comparable SERS performance realized by thickness-dependent enhancement

Youzhe Bao1Jiamei Chen1Mengfan Ding1Jing Zhang2Xing Xin1( )Deming Cui1Wei Xin1Weizhen Liu1( )Peng Li1Jiangang Ma1Haiyang Xu1 ( )Yichun Liu1

1 State Key Laboratory of Integrated Optoelectronics and Key Laboratory of UV Light-Emitting Materials and Technology of Ministry of Education, School of Physics, Northeast Normal University, Changchun 130024, China

2 Institute for Interdisciplinary Quantum Information Technology, Jilin Engineering Normal University, Changchun 130052, China

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Abstract

Metallic MoO2 is promising to be one of noble-metal-comparable SERS substrate materials based on the strong electromagnetic mechanism (EM) enhancement. However, the SERS performance is still unable to meet the practical application requirements. Synthesizing large-scale 2D metallic MoO2 with controllable thickness, even at atomic level is an effective solution, but it has rarely been reported. The enhancement mechanism based on such kind of metallic metal oxide SERS substrates also lacks a more systematic study. Here, submillimeter-scale (~466 μm) atomic-thin (~4 nm) metallic MoO2 was firstly synthesized by chemical vapor deposition (CVD). What’s more, it shows high sensitivity as SERS substrates with a maximum enhancement factor up to 107 and a limit of detection down to 10-9 M, which is at a high level among most metal oxide-based SERS substrates and even comparable to the values of noble metal substrates with ‘hot spots’. It was also firstly and systematically found that both the EM (SPR effect) and CM (charge transfer process) enhancements exist simultaneously in such MoO2 substrate. The key lies in the thickness of MoO2 that determines the dominant enhancement mechanism. MoO2 flakes not only possess noble-metal-comparable SERS performance, but also show potential in image security and information encryption.

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Cite this article:
Bao Y, Chen J, Ding M, et al. Submillimeter-scale atomic-thin metallic MoO2 with noble metal-comparable SERS performance realized by thickness-dependent enhancement. Nano Research, 2026, https://doi.org/10.26599/NR.2026.94908825

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Received: 11 March 2026
Revised: 07 May 2026
Accepted: 09 May 2026
Available online: 09 May 2026

© The Author(s) 2026. Published by Tsinghua University Press.

This is an open access article under the terms of the Creative Commons Attribution 4.0 International License (CC BY 4.0, https://creativecommons.org/licenses/by/4.0/)