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Research Article | Open Access

A universal multi-source fusion acceleration sensor for vibration monitoring in irregular space

Junbin Yu1,2Tie Li1Junfei Lin2Juanhong Zhao2Qin Li2Jian He2Jiliang Mu2Ting Zhang1 ( )Xiujian Chou2 ( )
i-Lab, Nano-X Vacuum Interconnected Workstation, Key Laboratory of Multifunction Nanomaterials and Smart Systems, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS), Suzhou 215123, China
Science and Technology on Electronic Test and Measurement Laboratory, School of Instrument and Electronics, North University of China, Taiyuan 030051, China
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Abstract

Acceleration sensors capable of human physiological information and unmanned equipment operating state evaluating have significant applications in advanced sensing and intelligent control. Especially, achieving self-powered sensing of various vibration information in irregular space is still a challenge. Herein, a multi-source fusion self-powered acceleration sensor integrated two triboelectric sensing modules and two electromagnetic sensing modules is successfully proposed via heterogeneous integration strategy and micro-capacitor model, which realizes the high-accuracy and high-reliability vibration acceleration monitoring. In addition, the flexible symmetric structure imparts the device with conformal property, broadening its application scenarios. Combined with customed four-channel acquisition storage circuit and linear fitting algorithm of multi-source sensory data, the developed acceleration sensor has excellent practicality to accurately sense and predict various acceleration states with accuracy of 96%. This capability of the sensing system underscores the practical utility of human sole and unmanned aerial vehicle wing to evaluate physiological and operating state, which addresses the critical acceleration sensory challenges in irregular space by providing a sensitive, reliable and conformal sensing strategy.

Graphical Abstract

A flexible, self-powered multi-source fusion acceleration sensor integrating triboelectric and electromagnetic modules enables conformal vibration monitoring in irregular spaces with high sensitivity, reliability, and a broad measurement range of 0–60 m/s2. Combined with a custom four-channel acquisition circuit and data-fusion algorithm, the system achieves 96% prediction accuracy and demonstrates practical utility for human physiological monitoring and unmanned equipment state evaluation.

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Nano Research
Article number: 94908752

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Cite this article:
Yu J, Li T, Lin J, et al. A universal multi-source fusion acceleration sensor for vibration monitoring in irregular space. Nano Research, 2026, 19(9): 94908752. https://doi.org/10.26599/NR.2026.94908752
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Received: 30 December 2025
Revised: 30 March 2026
Accepted: 20 April 2026
Published: 20 July 2026
© The Author(s) 2026. Published by Tsinghua University Press.

This is an open access article under the terms of the Creative Commons Attribution 4.0 International License (CC BY 4.0, https://creativecommons.org/licenses/by/4.0/).