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Research Article | Open Access

Dewdrop-templated clean growth of graphene micromeshes on SiO2/Si substrates for highly sensitive NO2 gas sensors

Shijing Wei1,2,3,§ Tianya Zhou3,§ Xin-Ling He1 Wenyuan Jin1 Feijiu Wang2 Chuan Xu3,4 Lai-Peng Ma3,4 ( )Hui-Ming Cheng3,5 Wencai Ren3,4 ( )
Institute of Physics, Henan Academy of Sciences, Zhengzhou 450046, China
Henan Key Laboratory of Quantum Materials and Quantum Energy, School of Quantum Information Future Technology, Henan University, Zhengzhou 450046, China
Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China
School of Materials Science and Engineering, University of Science and Technology of China, Shenyang 110016, China
Institute of Technology for Carbon Neutrality, Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen 518055, China

§ Shijing Wei and Tianya Zhou contributed equally to this work.

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Abstract

Graphene meshes (GMs) have attracted considerable attention as advanced materials for high-performance gas sensing due to their high-density active edge sites and excellent electronic properties. However, the contamination-free preparation of GMs remains a challenge. Herein, we present a dewdrop-templated chemical vapor deposition approach to directly grow clean and intact graphene micromeshes (GMM) on SiO2/Si substrates. The self-assembled micrometer-sized dewdrops from controlled water vapor condensation serve as a residue-free template for directing the growth of GMM with tunable hole sizes from submicrons to tens of microns. Density functional theory (DFT) calculations reveal that carbon species preferentially adsorb on pristine SiO2 regions to form a mesh structure. Contamination-free GMM gas sensors were fabricated using a simple transfer-free process, demonstrating a record-high sensitivity of 7.25 %·ppm−1 and an ultra-low detection limit of 1.18 ppb for NO2 at room temperature. Complementary DFT studies elucidate that NO2 molecules adsorb more strongly on the edges of GMM, leading to a high response of the sensor. This work offers profound insights into dewdrop-templated graphene growth mechanisms and establishes a simple yet effective approach for fabricating high-performance transfer-free GMM sensors, thus paving the way for their practical applications in environmental monitoring and industrial safety fields.

Graphical Abstract

A dewdrop-templated chemical vapor deposition (CVD) method enables the direct growth of clean, intact graphene micromeshes on SiO2/Si substrates, achieving exceptional NO2 sensing with a sensitivity of 7.25 %·ppm−1 and a detection limit of 1.18 ppb. This residue-free approach overcomes limitations of traditional fabrication, offering a scalable solution for high-performance gas sensors.

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Nano Research
Article number: 94907861

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Cite this article:
Wei S, Zhou T, He X-L, et al. Dewdrop-templated clean growth of graphene micromeshes on SiO2/Si substrates for highly sensitive NO2 gas sensors. Nano Research, 2025, 18(11): 94907861. https://doi.org/10.26599/NR.2025.94907861
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Received: 28 May 2025
Revised: 15 July 2025
Accepted: 31 July 2025
Published: 16 October 2025
© The Author(s) 2025. Published by Tsinghua University Press.

This is an open access article under the terms of the Creative Commons Attribution 4.0 International License (CC BY 4.0, https://creativecommons.org/licenses/by/4.0/).