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Research Article | Open Access

Direct photopatterning of perovskite nanocrystal films for building pixelated photodetector arrays

Hannikezi Abudukeremu1,§Guan-Hua Dun2,§Hengwei Qiu1Dan Liu1Fu Li3Song Wang1Junyang Hou1Wangyu Liu1Mingfeng Cai1Tian-Ling Ren2 ( )Hao Zhang1 ( )Jinghong Li1 ( )
Department of Chemistry, Center for BioAnalytical Chemistry, Key Laboratory of Bioorganic Phosphorus Chemistry & Chemical Biology (Ministry of Education), Tsinghua University, Beijing 100084, China
School of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China

§ Hannikezi Abudukeremu and Guan-Hua Dun contributed equally to this work.

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Abstract

Metal halide-based perovskites, with their exceptional photoelectric conversion efficiency, are promising materials for photodetectors and image sensors. Achieving high-definition optical imaging requires not only high-quality perovskite materials but also effective patterning methods. Here, we show the fabrication of pixelated photodetector arrays through a two-step process: (1) direct optical patterning of CsPbBr3 perovskite nanocrystal films using ligand cross-linkers, and (2) post-patterning ligand-exchange process. The direct optical patterning achieves high-resolution (≈ 2 μm in pixel sizes), uniform CsPbBr3 nanocrystal film patterns over 2-inch wafers. The ligand-exchange process replaces the long hydrocarbon ligands and cross-linkers with compact ionic ligands, which enhance the charge transport efficacy without compromising the quality of the patterned films. Consequently, the patterned photodetectors, in the photoconductor configuration, show responsivity (0.11 A·W−1) and specific detectivity (1.81 × 1011 Jones) on par with their non-patterned counterparts. These features permit the creation of pixelated photodetector arrays that minimize the charge-sharing crosstalk effect and enable improved imaging capabilities. This work shows a promising approach in building high-performance perovskite image sensors.

Graphical Abstract

This work reports a two-step approach, namely the DOPPLCER patterning and post-patterning ligand exchange of perovskite nanocrystal films, for building efficient photodetector arrays.

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Nano Research
Article number: 94907279

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Cite this article:
Abudukeremu H, Dun G-H, Qiu H, et al. Direct photopatterning of perovskite nanocrystal films for building pixelated photodetector arrays. Nano Research, 2025, 18(9): 94907279. https://doi.org/10.26599/NR.2025.94907279
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Received: 18 December 2024
Revised: 26 January 2025
Accepted: 27 January 2025
Published: 01 April 2025
© The Author(s) 2025. Published by Tsinghua University Press.

This is an open access article under the terms of the Creative Commons Attribution 4.0 International License (CC BY 4.0, https://creativecommons.org/licenses/by/4.0/).