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Over the past twenty years, there has been high demand for novel functional materials for use in high-capacity dielectrics. Perovskite-type oxynitrides, which are derived from the introduction of nitrogen atoms into their corresponding oxides, possess a variety of improved chemical and physical properties. The dielectric performance of BaTa(O,N)3 is highly dependent on its purity, density, and microstructure. However, conventional sintering methods often result in low-density samples (< 90% theoretical density) with many impurities, leading to poor dielectric properties. In this study, we adopted a two-step sintering method, i.e., rapid spark plasma sintering at a lower temperature followed by postannealing in flowing ammonia at a higher temperature, to obtain BaTa(O,N)3 ceramic bulks with both high density and purity (up to 96.7% theoretical density and 97.94 wt% oxynitride phase content). The average particle size is 281.1 nm, with a uniform distribution of all the elements. The measured dielectric constant is as high as 2.1×105 at 100 Hz (room temperature), which surpasses the values reported for other oxynitride dielectrics. A notable and unusual dielectric enhancement was observed at elevated temperatures, with the value reaching ~107 at 200−250 °C. This mechanism can be attributed to defect-mediated polarization, including anion-ordering-induced permanent dipoles and oxygen vacancies, and thermally activated reconfigurable polar nanoregions that are verified by calculation and in situ transmission electron microscopy (TEM) analysis. These findings establish a general pathway to fabricate dense oxynitride ceramic bulks with high purity and collective permittivity for prospective applications in high-performance dielectric devices.

This is an open access article under the terms of the Creative Commons Attribution 4.0 International License (CC BY 4.0, http://creativecommons.org/licenses/by/4.0/).
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