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Journal of Advanced Ceramics 2023, 12(9): 1701-1711 https://doi.org/10.26599/JAC.2023.9220780
Research Article | Open Access | Issue | Published: 05 September 2023

HPMA modified aluminium nitride powder for aqueous tape casting of AlN ceramic substrates

Show Author's Information Meng Lia,b,  Jianping Aia( ),  Zhengjuan Wangb( ),  Zhenhai Xueb,  Lihong Chenga,  Guohong Zhoub,  Shiwei Wangb
School of Materials and Mechatronics, Jiangxi Science & Technology Normal University, Nanchang 330038, China
State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China
Keywords:
aluminum nitride (AlN), surface modification, hydrolysis resistance, aqueous tape casting, hydrolyzed polymaleic anhydride (HPMA)
Cite this article:
Li M, Ai J, Wang Z, et al. HPMA modified aluminium nitride powder for aqueous tape casting of AlN ceramic substrates. Journal of Advanced Ceramics, 2023, 12(9): 1701-1711. https://doi.org/10.26599/JAC.2023.9220780
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Abstract Full text About this article

Aluminum nitride (AlN) is considered one of the most desirable materials for integrated circuits and electronic packaging substrates. However, raw AlN powder reacts easily with water, forming Al(OH)3 or AlOOH on the surface and hindering the development of an aqueous tape-casting process for preparing AlN ceramic substrates. In this study, hydrolyzed polymaleic anhydride (HPMA) was used to modify AlN powder, which has good water solubility and dispersibility. The AlN powder was modified with 5 wt% HPMA remained stable in water for at least 90 h under magnetic stirring condition and 24 h under ball milling condition, indicating that HPMA-modified AlN powder has good resistance to hydrolysis. The action mechanism of HPMA is revealed. Firstly, –COOH of the HPMA polymer and the oxide layer on the surface of the AlN powder underwent a dehydration condensation reaction to form a compound. Secondly, long chains of the polymer further coated the surface of the AlN powder, forming an anti-hydration layer with a thickness of about 7.0 nm on the surface of the AlN particles. In addition, AlN green sheets were successfully prepared by aqueous tape casting using the HPMA-modified AlN powder without additional dispersants. Subsequently, AlN ceramic substrates were obtained by sintering at 1750 ℃ for 4 h under an N2 atmosphere with a pressure of 0.2 MPa. The relative density and thermal conductivity were tested to be 97.3% and 122 W/(m·K), respectively.


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About this article

HPMA modified aluminium nitride powder for aqueous tape casting of AlN ceramic substrates

Show Author's information Meng Lia,b, Jianping Aia( ), Zhengjuan Wangb( ), Zhenhai Xueb, Lihong Chenga, Guohong Zhoub, Shiwei Wangb
School of Materials and Mechatronics, Jiangxi Science & Technology Normal University, Nanchang 330038, China
State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China

Abstract

Aluminum nitride (AlN) is considered one of the most desirable materials for integrated circuits and electronic packaging substrates. However, raw AlN powder reacts easily with water, forming Al(OH)3 or AlOOH on the surface and hindering the development of an aqueous tape-casting process for preparing AlN ceramic substrates. In this study, hydrolyzed polymaleic anhydride (HPMA) was used to modify AlN powder, which has good water solubility and dispersibility. The AlN powder was modified with 5 wt% HPMA remained stable in water for at least 90 h under magnetic stirring condition and 24 h under ball milling condition, indicating that HPMA-modified AlN powder has good resistance to hydrolysis. The action mechanism of HPMA is revealed. Firstly, –COOH of the HPMA polymer and the oxide layer on the surface of the AlN powder underwent a dehydration condensation reaction to form a compound. Secondly, long chains of the polymer further coated the surface of the AlN powder, forming an anti-hydration layer with a thickness of about 7.0 nm on the surface of the AlN particles. In addition, AlN green sheets were successfully prepared by aqueous tape casting using the HPMA-modified AlN powder without additional dispersants. Subsequently, AlN ceramic substrates were obtained by sintering at 1750 ℃ for 4 h under an N2 atmosphere with a pressure of 0.2 MPa. The relative density and thermal conductivity were tested to be 97.3% and 122 W/(m·K), respectively.

Keywords: aluminum nitride (AlN), surface modification, hydrolysis resistance, aqueous tape casting, hydrolyzed polymaleic anhydride (HPMA)

References(50)

[1]
Harris JH. Sintered aluminum nitride ceramics for high-power electronic applications. JOM 1998, 50: 56–60.
DOI Google Scholar
[2]
Kume S, Yasuoka M, Lee SK, et al. Dielectric and thermal properties of AlN ceramics. J Eur Ceram Soc 2007, 27: 2967–2971.
DOI Google Scholar
[3]
Franco A Jr, Shanafield DJ. Thermal conductivity of polycrystalline aluminum nitride (AlN) ceramics. Cerâmica 2004, 50: 247–253.
DOI Google Scholar
[4]
Fattahi M, Vaferi K, Vajdi M, et al. Aluminum nitride as an alternative ceramic for fabrication of microchannel heat exchangers: A numerical study. Ceram Int 2020, 46: 11647–11657.
DOI Google Scholar
[5]
Werdecker W, Aldinger F. Aluminum nitride-an alternative ceramic substrate for high power applications in microcircuits. IEEE Trans Compon Hybrids Manuf Technol 1984, 7: 399–404.
DOI Google Scholar
[6]
Marie J, Bourret J, Geffroy PM, et al. Eco-friendly alumina suspensions for tape-casting process. J Eur Ceram Soc 2017, 37: 5239–5248.
DOI Google Scholar
[7]
Hotza D, Greil P. Review: Aqueous tape casting of ceramic powders. Mater Sci Eng A 1995, 202: 206–217.
DOI Google Scholar
[8]
Ding MM, Shi Y, Xie JJ, et al. Optimization of non-aqueous tape casting of high solid loading slurry for aluminum nitride ceramic substrates. Int J Appl Ceram Technol 2020, 17: 285–295.
DOI Google Scholar
[9]
Wiecinska P, Graule T, Bachonko M. Organic additives in gel-tape casting of ceramic powders—A novel approach to the problem of elasticity and cracking of thin tapes. J Eur Ceram Soc 2015, 35: 3949–3957.
DOI Google Scholar
[10]
Wei ZL, Li K, Ge BZ, et al. Synthesis of nearly spherical AlN particles by an in situ nitriding combustion route. J Adv Ceram 2021, 10: 291–300.
DOI Google Scholar
[11]
Fukumoto S, Hookabe T, Tsubakino H. Hydrolysis behavior of aluminum nitride in various solutions. J Mater Sci 2000, 35: 2743–2748.
DOI Google Scholar
[12]
Bowen P, Highfield JG, Mocellin A, et al. Degradation of aluminum nitride powder in an aqueous environmet. J Am Ceram Soc 1990, 73: 724–728.
DOI Google Scholar
[13]
Svedberg LM, Arndt KC, Cima MJ. Corrosion of aluminum nitride (AlN) in aqueous cleaning solutions. J Am Ceram Soc 2000, 83: 41–46.
DOI Google Scholar
[14]
Wang EH, Chen JH, Hu XJ, et al. Evolution of aluminum hydroxides at the initial stage of aluminum nitride powder hydrolysis. Ceram Int 2016, 42: 11429–11434.
DOI Google Scholar
[15]
Yeh CT, Tuan WH. Oxidation mechanism of aluminum nitride revisited. J Adv Ceram 2017, 6: 27–32.
DOI Google Scholar
[16]
Shang QS, Wang ZJ, Li J, et al. Gel-tape-casting of aluminum nitride ceramics. J Adv Ceram 2017, 6: 67–72.
DOI Google Scholar
[17]
Zhang YH. Effect of surfactant on depressing the hydrolysis process for aluminum nitride powder. Mater Res Bull 2002, 37: 2393–2400.
DOI Google Scholar
[18]
Jarrige J, Lecompte JP, Mullot J, et al. Effect of oxygen on the thermal conductivity of aluminium nitride ceramics. J Eur Ceram Soc 1997, 17: 1891–1895.
DOI Google Scholar
[19]
Ganesh I, Thiyagarajan N, Sundararajan G, et al. A non-aqueous processing route for phosphate-protection of AlN powder against hydrolysis. J Eur Ceram Soc 2008, 28: 2281–2288.
DOI Google Scholar
[20]
Luo XJ, Li J, Zhang BL, et al. High thermal conductivity aluminum nitride substrates prepared by aqueous tape casting. J Am Ceram Soc 2006, 89: 836–841.
DOI Google Scholar
[21]
Zhan Y, Li W, Jiang TS, et al. Boron-modified perhydropolysilazane towards facile synthesis of amorphous SiBN ceramic with excellent thermal stability. J Adv Ceram 2022, 11: 1104–1116.
DOI Google Scholar
[22]
Yu GC, Xie JJ, Wang S, et al. Non hydrolizable aluminum nitride powders surface modified by silicic acids. Ceram Int 2021, 47: 29253–29260.
DOI Google Scholar
[23]
Zhang CY, Yu YL, Yang H, et al. Mechanism for the hydrolysis resistance of aluminum nitride powder modified by boric acid. Ceram Int 2022, 48: 32696–32702.
DOI Google Scholar
[24]
Shan HB, Zhu Y, Zhang ZT. Surface treatment and hydrolysis kinetics of organic films coated AlN powder. Br Ceram Trans 1999, 98: 146–150.
DOI Google Scholar
[25]
Wang S, Wang Y, Xie JJ, et al. Composite NVP-IA/AlN powders with core–shell structure for anti-hydrolysis. Appl Phys A 2022, 128: 603.
DOI Google Scholar
[26]
O'Toole RJ, Hill C, Buur PJ, et al. Hydrolysis protection and sintering of aluminum nitride powders with yttria nanofilms. J Am Ceram Soc 2022, 105: 3123–3127.
DOI Google Scholar
[27]
Binner J, Zhang YH. Surface chemistry and hydrolysis of a hydrophobic-treated aluminium nitride powder. Ceram Int 2005, 31: 469–474.
DOI Google Scholar
[28]
Olhero SM, Ferreira JMF. Rheological characterisation of water-based AlN slurries for the tape casting process. J Mater Process Technol 2005, 169: 206–213.
DOI Google Scholar
[29]
Shen ZH, Li JS, Xu K, et al. The effect of synthesized hydrolyzed polymaleic anhydride (HPMA) on the crystal of calcium carbonate. Desalination 2012, 284: 238–244.
DOI Google Scholar
[30]
Xue CH, Shi MM, Yan QX, et al. Preparation of water-soluble multi-walled carbon nanotubes by polymer dispersant assisted exfoliation. Nanotechnology 2008, 19: 115605.
DOI Google Scholar
[31]
Chen GF, Zhang Y, Zhou X, et al. Synthesis of styrene-maleic anhydride copolymer esters and their surface enriched properties when blending with polyethylene. Appl Surf Sci 2006, 253: 1107–1110.
DOI Google Scholar
[32]
Ponthieu E, Grange P, Delmon B, et al. Proposal of a composition model for commercial AlN powders. J Eur Ceram Soc 1991, 8: 233–241.
DOI Google Scholar
[33]
Wu D, Wang W, Tan FT, et al. Fabrication of pit-structured ZnO nanorods and their enhanced photocatalytic performance. RSC Adv 2013, 3: 20054–20059.
DOI Google Scholar
[34]
Hui RH, Guan CX, Hou DY. Study on IR characteristics of carboxylic acid and their salts. J Anshan Teach Coll 2001, 3: 95–98. (in Chinese)
Google Scholar
[35]
Egashira M, ShImizu Y, Takao YJ, et al. Effect of carboxylic acid adsorption on the hydrolysis and sintered properties of aluminum nitride powder. J Am Ceram Soc 1994, 77: 1793–1798.
DOI Google Scholar
[36]
Kim SY, Choi DK, Yeo DH, et al. Influence of ball milling contamination on properties of sintered AlN substrates. J Eur Ceram Soc 2020, 40: 5349–5356.
DOI Google Scholar
[37]
Kuroda Y, Hamano H, Mori T, et al. Specific adsorption behavior of water on a Y2O3 surface. Langmuir 2000, 16: 6937–6947.
DOI Google Scholar
[38]
Mohanty S, Das B, Dhara S. Poly(maleic acid)–A novel dispersant for aqueous alumina slurry. J Asian Ceram Soc 2013, 1: 184–190.
DOI Google Scholar
[39]
Kabanov AV, Vinogradov SV, Suzdaltseva YG, et al. Water-soluble block polycations as carriers for oligonucleotide delivery. Bioconjug Chem 1995, 6: 639–643.
DOI Google Scholar
[40]
Pochapski DJ, Carvalho Dos Santos C, Leite GW, et al. Zeta potential and colloidal stability predictions for inorganic nanoparticle dispersions: Effects of experimental conditions and electrokinetic models on the interpretation of results. Langmuir 2021, 37: 13379–13389.
DOI Google Scholar
[41]
Huang D, Tian ZB, Cui W, et al. Effects of Y2O3 and yttrium aluminates as sintering additives on the thermal conductivity of AlN ceramic substrates. Ceram Int 2018, 44: 20556–20559.
DOI Google Scholar
[42]
Zhou HQ, Zhu JX, Liu Z, et al. High thermal conductivity of suspended few-layer hexagonal boron nitride sheets. Nano Res 2014, 7: 1232–1240.
DOI Google Scholar
[43]
Rutkowski PJ, Kata D. Thermal properties of AlN polycrystals obtained by pulse plasma sintering method. J Adv Ceram 2013, 2: 180–184.
DOI Google Scholar
[44]
Qu ZX, Yu CJ, Wei YT, et al. Thermal conductivity of boron carbide under fast neutron irradiation. J Adv Ceram 2022, 11: 482–494.
DOI Google Scholar
[45]
Wei X, Zhang H, Dang JJ, et al. Phase and microstructure optimization of grain boundary oxides and its effect on the thermal conductivity of Y2O3-doped AlN ceramics. J Eur Ceram Soc 2022, 42: 4855–4865.
DOI Google Scholar
[46]
Yu YD, Hundere AM, Høier R, et al. Microstructural characterization and microstructural effects on the thermal conductivity of AlN(Y2O3) ceramics. J Eur Ceram Soc 2002, 22: 247–252.
DOI Google Scholar
[47]
Luo XJ, Zhang BL, Li WL, et al. Comparison of aqueous and non-aqueous tape casting of aluminum nitride substrates. J Am Ceram Soc 2005, 88: 497–499.
DOI Google Scholar
[48]
Liu SC, Ye F, Liu LM, et al. Preparation of aluminum nitride ceramics by aqueous tape casting. Mater Manuf Process 2015, 30: 605–610.
DOI Google Scholar
[49]
He XL, Jin T, Wang SL, et al. Microstructure and properties of aluminum nitride ceramics prepared by aqueous gelcasting method with nontoxic curdlan as gelling agent. Ceram Int 2023, 49: 24948–24959.
DOI Google Scholar
[50]
Olhero SM, Miranzo P, Ferreira JMF. Influence of the de-waxing atmosphere on the properties of AlN ceramics processed from aqueous media. J Eur Ceram Soc 2006, 26: 2475–2483.
DOI Google Scholar
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Publication history

Received: 11 April 2023
Revised: 20 June 2023
Accepted: 20 June 2023
Published: 05 September 2023
Issue date: September 2023

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© The Author(s) 2023.

Acknowledgements

This work was financially supported by the National Natural Science Foundation of China (Nos. 52102101, 52267001), and the Natural Science Foundation of Jiangxi Province (No. 20212BAB204019).

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