AI Chat Paper
Note: Please note that the following content is generated by AMiner AI. SciOpen does not take any responsibility related to this content.
{{lang === 'zh_CN' ? '文章概述' : 'Summary'}}
{{lang === 'en_US' ? '中' : 'Eng'}}
Chat more with AI
PDF (3.7 MB)
Collect
Submit Manuscript AI Chat Paper
Show Outline
Outline
Show full outline
Hide outline
Outline
Show full outline
Hide outline
Review | Open Access

Flexible inorganic piezoelectric functional films and their applications

Liyun Zhena,bLijun Lua,bYongtao YaocJingquan LiuaBin Yanga( )
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China
Department of Micro/Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
National Key Laboratory of Science and Technology on Advanced Composites in Special Environments, Harbin Institute of Technology, Harbin 150001, China
Show Author Information

Graphical Abstract

Abstract

Piezoelectric materials play an increasingly important role in energy harvesters, sensors, and actuators. Flexible and thin piezoelectric films have been demonstrated to provide advanced functionalities and improved performances. However, the research on flexible inorganic piezoelectric thin films has rarely been systematically summarized. Here, we summarize the recent advances in the flexible inorganic piezoelectric thin films, focusing on their structural designs, fabrication techniques, and applications in various practical scenarios. Specifically, different fabrication techniques suitable for diverse inorganic piezoelectric nanostructures are reviewed, including sol–gel, hydrothermal, electrospinning, and other techniques, and the integration process with flexible substrates is further discussed. Biomedical and industrial applications of the flexible piezoelectric thin films are emphasized. Finally, some existing challenges and future perspectives are discussed.

References

[1]
Mahapatra SD, Mohapatra PC, Aria AI, et al. Piezoelectric materials for energy harvesting and sensing applications: Roadmap for future smart materials. Adv Sci 2021, 8: 2100864.
[2]
Vijayakanth T, Liptrot DJ, Gazit E, et al. Recent advances in organic and organic–inorganic hybrid materials for piezoelectric mechanical energy harvesting. Adv Funct Mater 2022, 32: 2109492.
[3]
Zhou QT, Pan J, Deng SJ, et al. Triboelectric nanogenerator-based sensor systems for chemical or biological detection. Adv Mater 2021, 33: 2008276.
[4]
Dutta S, Patil R, Dey T. Electron transfer-driven single and multi-enzyme biofuel cells for self-powering and energy bioscience. Nano Energy 2022, 96: 107074.
[5]
Jia YH, Jiang QL, Sun HD, et al. Wearable thermoelectric materials and devices for self-powered electronic systems. Adv Mater 2021, 33: 2102990.
[6]
Liu RY, Wang ZL, Fukuda K, et al. Flexible self-charging power sources. Nat Rev Mater 2022, 7: 870–886.
[7]
Hu GS, Yi ZR, Lu LJ, et al. Self-powered 5G NB-IoT system for remote monitoring applications. Nano Energy 2021, 87: 106140.
[8]
Huang Y, Lu LJ, Yi ZR, et al. Aeroacoustics-driven jet-stream wind energy harvester induced by jet-edge-resonator. Nano Energy 2021, 89: 106441.
[9]
Zeng YM, Luo Y, Lu YR, et al. Self-powered rain droplet sensor based on a liquid–solid triboelectric nanogenerator. Nano Energy 2022, 98: 107316.
[10]
Ouyang R, Miao J, Wu T, et al. Magnets assisted triboelectric nanogenerator for harvesting water wave energy. Adv Mater Technol 2022, 7: 2200403.
[11]
Lu LJ, Yang B, Zhai YQ, et al. Electrospinning core–sheath piezoelectric microfibers for self-powered stitchable sensor. Nano Energy 2020, 76: 104966.
[12]
You MH, Wang XX, Yan X, et al. A self-powered flexible hybrid piezoelectric–pyroelectric nanogenerator based on non-woven nanofiber membranes. J Mater Chem A 2018, 6: 3500–3509.
[13]
Zhu ML, Shi QF, He T, et al. Self-powered and self-functional cotton sock using piezoelectric and triboelectric hybrid mechanism for healthcare and sports monitoring. ACS Nano 2019, 13: 1940–1952.
[14]
Lee M, Chen CY, Wang SH, et al. A hybrid piezoelectric structure for wearable nanogenerators. Adv Mater 2012, 24: 1759–1764.
[15]
Yi ZR, Huang JJ, Liu ZX, et al. Portable, wireless wearable piezoelectric arterial pulse monitoring system based on near-field communication approach. IEEE Electron Device Lett 2020, 41: 183–186.
[16]
Yi ZR, Xie F, Tian YW, et al. A battery- and leadless heart-worn pacemaker strategy. Adv Funct Mater 2020, 30: 2000477.
[17]
Su YJ, Chen GR, Chen CX, et al. Self-powered respiration monitoring enabled by a triboelectric nanogenerator. Adv Mater 2021, 33: 2101262.
[18]
Su YJ, Chen CX, Pan H, et al. Muscle fibers inspired high-performance piezoelectric textiles for wearable physiological monitoring. Adv Funct Mater 2021, 31: 2010962.
[19]
Li N, Yi ZR, Ma Y, et al. Direct powering a real cardiac pacemaker by natural energy of a heartbeat. ACS Nano 2019, 13: 2822–2830.
[20]
Yi ZR, Liu ZX, Li WB, et al. Piezoelectric dynamics of arterial pulse for wearable continuous blood pressure monitoring. Adv Mater 2022, 34: 2110291.
[21]
Dagdeviren C, Javid F, Joe P, et al. Flexible piezoelectric devices for gastrointestinal motility sensing. Nat Biomed Eng 2017, 1: 807–817.
[22]
Xu C, Song Y, Han MD, et al. Portable and wearable self-powered systems based on emerging energy harvesting technology. Microsyst Nanoeng 2021, 7: 25.
[23]
Mason WP. Piezoelectricity, its history and applications. J Acoust Soc Am 1981, 70: 1561–1566.
[24]
Hao JG, Li W, Zhai JW, et al. Progress in high-strain perovskite piezoelectric ceramics. Mater Sci Eng 2019, 135: 1–57.
[25]
Chen C, Wang X, Wang Y, et al. Additive manufacturing of piezoelectric materials. Adv Funct Mater 2020, 30: 2005141.
[26]
Lu LJ, Ding WQ, Liu JQ, et al. Flexible PVDF based piezoelectric nanogenerators. Nano Energy 2020, 78: 105251.
[27]
Jin T, Sun ZD, Li L, et al. Triboelectric nanogenerator sensors for soft robotics aiming at digital twin applications. Nat Commun 2020, 11: 5381.
[28]
Park YG, Lee S, Park JU. Recent progress in wireless sensors for wearable electronics. Sensors 2019, 19: 4353.
[29]
Liu Q, Wang XX, Song WZ, et al. Wireless single-electrode self-powered piezoelectric sensor for monitoring. ACS Appl Mater Inter 2020, 12: 8288–8295.
[30]
Li LJ, Miao L, Zhang Z, et al. Recent progress in piezoelectric thin film fabrication via the solvothermal process. J Mater Chem A 2019, 7: 16046–16067.
[31]
Toprak A, Tigli O. Piezoelectric energy harvesting: State-of-the-art and challenges. Appl Phys Rev 2014, 1: 031104.
[32]
Scheffler S, Poulin P. Piezoelectric fibers: Processing and challenges. ACS Appl Mater Inter 2022, 14: 16961–16982.
[33]
Cheng LQ, Feng M, Sun YW, et al. Synthesis and characterization of two-dimensional lead-free (K,Na)NbO3 micro/nano piezoelectric structures. J Adv Ceram 2020, 9: 27–34.
[34]
Dagdeviren C, Joe P, Tuzman OL, et al. Recent progress in flexible and stretchable piezoelectric devices for mechanical energy harvesting, sensing and actuation. Extreme Mech Lett 2016, 9: 269–281.
[35]
Fu YQ, Luo JK, Nguyen NT, et al. Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications. Prog Mater Sci 2017, 89: 31–91.
[36]
Li HD, Tian C, Deng ZD. Energy harvesting from low frequency applications using piezoelectric materials. Appl Phys Rev 2014, 1: 041301.
[37]
Kang M, Park JH, Lee KI, et al. Fully flexible and transparent piezoelectric touch sensors based on ZnO nanowires and BaTiO3-added SiO2 capping layers. Phys Status Solidi A 2015, 212: 2005–2011.
[38]
Dagdeviren C, Shi Y, Joe P, et al. Conformal piezoelectric systems for clinical and experimental characterization of soft tissue biomechanics. Nat Mater 2015, 14: 728–736.
[39]
Park KI, Xu S, Liu Y, et al. Piezoelectric BaTiO3 thin film nanogenerator on plastic substrates. Nano Lett 2010, 10: 4939–4943.
[40]
Cheng YYS, Liu LS, Huang Y, et al. All-inorganic flexible (K,Na)NbO3-based lead-free piezoelectric thin films spin-coated on metallic foils. ACS Appl Mater Inter 2021, 13: 39633–39640.
[41]
Sun T, Tasnim F, McIntosh RT, et al. Decoding of facial strains via conformable piezoelectric interfaces. Nat Biomed Eng 2020, 4: 954–972.
[42]
Liu SY, Shan Y, Hong Y, et al. 3D conformal fabrication of piezoceramic films. Adv Sci 2022, 9: 2106030.
[43]
Liu Y, Wang YJ. Flexible piezoelectric materials and device application. J Chin Ceram Soc 2022, 50: 625–641. (in Chinese)
[44]
Hu N, Liu XN, Yang ZZ. Advances of lead-free flexible piezoelectric composites. Guangzhou Chemistry 2004, 29: 46–51. (in Chinese)
[45]
Zhang HB. Research progress of flexible piezoelectric composites. Zhejiang Chemical Industry 2019, 50: 1–4. (in Chinese)
[46]
Wu JG. Perovskite lead-free piezoelectric ceramics. J Appl Phys 2020, 127: 190901.
[47]
Trolier-McKinstry S, Zhang SJ, Bell AJ, et al. High-performance piezoelectric crystals, ceramics, and films. Annu Rev Mater Res 2018, 48: 191–217.
[48]
Panda PK, Sahoo B. PZT to lead free piezo ceramics: A review. Ferroelectrics 2015, 474: 128–143.
[49]
Bhalla AS, Guo RY, Roy R. The perovskite structure—A review of its role in ceramic science and technology. Mater Res Innov 2000, 4: 3–26.
[50]
Shrout TR, Zhang SJ. Lead-free piezoelectric ceramics: Alternatives for PZT? J Electroceram 2007, 19: 113–126.
[51]
Li JF, Wang K, Zhu FY, et al. (K,Na)NbO3-based lead-free piezoceramics: Fundamental aspects, processing technologies, and remaining challenges. J Am Ceram Soc 2013, 96: 3677–3696.
[52]
Liu WF, Ren XB. Large piezoelectric effect in Pb-free ceramics. Phys Rev Lett 2009, 103: 257602.
[53]
Ghasemifard M, Hosseini SM, Khorrami GH. Synthesis and structure of PMN–PT ceramic nanopowder free from pyrochlore phase. Ceram Int 2009, 35: 2899–2905.
[54]
Kimura S, Tomioka S, Iizumi S, et al. Improved performances of acoustic energy harvester fabricated using sol/gel lead zirconate titanate thin film. Jpn J Appl Phys 2011, 50: 06GM14.
[55]
Vergara A, Tsukamoto T, Fang W, et al. Integration of buried piezoresistive sensors and PZT thin film for dynamic and static position sensing of MEMS actuator. J Micromech Microeng 2020, 30: 115020.
[56]
Wu CC, Lee CC, Cao GZ, et al. Effects of corner frequency on bandwidth and resonance amplitude in designing PZT thin-film actuators. Sens Actuat A-Phys 2006, 125: 178–185.
[57]
Wright AF. Elastic properties of zinc-blende and wurtzite AlN, GaN, and InN. J Appl Phys 1997, 82: 2833–2839.
[58]
Guo L, Ji YL, Xu HB, et al. Regularly shaped, single-crystalline ZnO nanorods with wurtzite structure. J Am Chem Soc 2002, 124: 14864–14865.
[59]
Tonisch K, Cimalla V, Foerster C, et al. Piezoelectric properties of polycrystalline AlN thin films for MEMS application. Sens Actuat A-Phys 2006, 132: 658–663.
[60]
Wang ZL, Song JH. Piezoelectric nanogenerators based on zinc oxide nanowire arrays. Science 2006, 312: 242–246.
[61]
Hu DW, Yao MG, Fan Y, et al. Strategies to achieve high performance piezoelectric nanogenerators. Nano Energy 2019, 55: 288–304.
[62]
Xu SY, Yeh YW, Poirier G, et al. Flexible piezoelectric PMN–PT nanowire-based nanocomposite and device. Nano Lett 2013, 13: 2393–2398.
[63]
He J, Guo XP, Yu JB, et al. A high-resolution flexible sensor array based on PZT nanofibers. Nanotechnology 2020, 31: 155503.
[64]
Jung JH, Lee M, Hong JI, et al. Lead-free NaNbO3 nanowires for a high output piezoelectric nanogenerator. ACS Nano 2011, 5: 10041–10046.
[65]
Selvarajan S, Alluri NR, Chandrasekhar A, et al. Unconventional active biosensor made of piezoelectric BaTiO3 nanoparticles for biomolecule detection. Sensor Actuat B-Chem 2017, 253: 1180–1187.
[66]
Xu SY, Poirier G, Yao N. PMN–PT nanowires with a very high piezoelectric constant. Nano Lett 2012, 12: 2238–2242.
[67]
Zhang Z, Chen Y, Guo JS. ZnO nanorods patterned-textile using a novel hydrothermal method for sandwich structured-piezoelectric nanogenerator for human energy harvesting. Physica E 2019, 105: 212–218.
[68]
Manjula Y, Kumar RR, Raju PMS, et al. Piezoelectric flexible nanogenerator based on ZnO nanosheet networks for mechanical energy harvesting. Chem Phys 2020, 533: 110699.
[69]
Qi Y, Kim J, Nguyen TD, et al. Enhanced piezoelectricity and stretchability in energy harvesting devices fabricated from buckled PZT ribbons. Nano Lett 2011, 11: 1331–1336.
[70]
Yang Q, Wang DY, Zhang M, et al. Lead-free (Na0.83K0.17)0.5Bi0.5TiO3 nanofibers for wearable piezoelectric nanogenerators. J Alloys Compd 2016, 688: 1066–1071.
[71]
Chaiyo N, Cann DP, Vittayakorn N. Phase transitions, ferroelectric, and piezoelectric properties of lead-free piezoelectric xBaZrO3–(0.25−x)CaTiO3–0.75BaTiO3 ceramics. J Mater Sci 2015, 50: 6171–6179.
[72]
Dixit A, Majumder SB, Savvinov A, et al. Investigations on the sol–gel-derived barium zirconium titanate thin films. Mater Lett 2002, 56: 933–940.
[73]
Znaidi L. Sol–gel-deposited ZnO thin films: A review. Mater Sci Eng B 2010, 174: 18–30.
[74]
Iqbal A, Mohd-Yasin F. Reactive sputtering of aluminum nitride (002) thin films for piezoelectric applications: A review. Sensors 2018, 18: 1797.
[75]
Shimizu YSY. Current status of piezoelectric substrate and propagation characteristics for SAW devices. Jpn J Appl Phys 1993, 32: 2183–2187.
[76]
Luo J, Qiu JH, Zhu KJ, et al. Effects of the calcining temperature on the piezoelectric and dielectric properties of 0.55PNN–0.45PZT ceramics. Ferroelectrics 2011, 425: 90–97.
[77]
Jarupoom P, Rujijanagul G. Improvement in piezoelectric strain of annealed Ba(Zr0.07Ti0.93)O3 based ceramics. J Appl Phys 2013, 114: 027018.
[78]
Chen DY, Phillips JD. Electric field dependence of piezoelectric coefficient in ferroelectric thin films. J Electroceram 2006, 17: 613–617.
[79]
Park KI, Son JH, Hwang GT, et al. Highly-efficient, flexible piezoelectric PZT thin film nanogenerator on plastic substrates. Adv Mater 2014, 26: 2514–2520.
[80]
Tanaka K, Kakimoto KI, Ohsato H. Fabrication of highly oriented lead-free (Na,K)NbO3 thin films at low temperature by sol–gel process. J Cryst Growth 2006, 294: 209–213.
[81]
Lian L, Sottos NR. Stress effects in sol–gel derived ferroelectric thin films. J Appl Phys 2004, 95: 629–634.
[82]
Won SS, Seo H, Kawahara M, et al. Flexible vibrational energy harvesting devices using strain-engineered perovskite piezoelectric thin films. Nano Energy 2019, 55: 182–192.
[83]
Wang MR, Wang J, Chen W, et al. Effect of preheating and annealing temperatures on quality characteristics of ZnO thin film prepared by sol–gel method. Mater Chem Phys 2006, 97: 219–225.
[84]
Lian L, Sottos NR. Effects of thickness on the piezoelectric and dielectric properties of lead zirconate titanate thin films. J Appl Phys 2000, 87: 3941–3949.
[85]
Znaidi L, Soler-Illia GJAA, Benyahia S, et al. Oriented ZnO thin films synthesis by sol–gel process for laser application. Thin Solid Films 2003, 428: 257–262.
[86]
Tsai CC, Chu SY, Hong CS, et al. Effects of annealing temperature and pressure of vacuum infiltration on the electrical properties of Pb(Zr0.52Ti0.48)O3 thick films prepared via a modified sol–gel method. Thin Solid Films 2020, 706: 138071.
[87]
Rajagopalan P, Singh V, Palani IA. Enhancement of ZnO-based flexible nano generators via a sol–gel technique for sensing and energy harvesting applications. Nanotechnology 2018, 29: 105406.
[88]
Barrow DA, Petroff TE, Tandon RP, et al. Characterization of thick lead zirconate titanate films fabricated using a new sol gel based process. J Appl Phys 1997, 81: 876–881.
[89]
Wu DW, Zhou QF, Shung KK, et al. Dielectric and piezoelectric properties of PZT composite thick films with variable solution to powder ratios. J Am Ceram Soc 2009, 92: 1276–1279.
[90]
Liu SY, Zou D, Yu XG, et al. Transfer-free PZT thin films for flexible nanogenerators derived from a single-step modified sol–gel process on 2D mica. ACS Appl Mater Inter 2020, 12: 54991–54999.
[91]
Lai FP, Li JF. Sol–gel processing of lead-free (Na,K)NbO3 ferroelectric films. J Sol–gel Sci Techn 2007, 42: 287–292.
[92]
Wang J, Chen W, Wang MR. Properties analysis of Mn-doped ZnO piezoelectric films. J Alloys Compd 2008, 449: 44–47.
[93]
Fan QQ, Li DN, Li JH, et al. Structure and piezoelectricity properties of V-doped ZnO thin films fabricated by sol–gel method. J Alloys Compd 2020, 829: 154483.
[94]
Tsai CC, Chien YC, Hong CS, et al. Study of Pb(Zr0.52Ti0.48)O3 microelectromechanical system piezoelectric accelerometers for health monitoring of mechanical motors. J Am Ceram Soc 2019, 102: 4056–4066.
[95]
Cui WH, Wang XH, Wu YY, et al. Investigation of thickness dependence of electric properties of sol–gel BNT–BT thin films with stepwise crystallization. J Ceram Soc Jpn 2016, 124: 464–468.
[96]
Li AD, Mak CL, Wong KH, et al. Thickness-dependent structural characteristics of sol–gel-derived epitaxial (PbZr)TiO3 films using inorganic zirconium salt. J Cryst Growth 2002, 235: 307–312.
[97]
Zhang KM, Zhao YP, He FQ, et al. Piezoelectricity of ZnO films prepared by sol–gel method. Chinese J Chem Phys 2007, 20: 721–726.
[98]
Zhong CF, Wang XH, Fang J, et al. Investigation of thickness dependence of structure and electric properties of sol–gel-derived BiScO3–PbTiO3 thin films. J Am Ceram Soc 2010, 93: 3305–3311.
[99]
Ion V, Craciun F, Scarisoreanu ND, et al. Impact of thickness variation on structural, dielectric and piezoelectric properties of (Ba,Ca)(Ti,Zr)O3 epitaxial thin films. Sci Rep 2018, 8: 2056.
[100]
Qiu Y, Lei JX, Yang DC, et al. Enhanced performance of wearable piezoelectric nanogenerator fabricated by two-step hydrothermal process. Appl Phys Lett 2014, 104: 113903.
[101]
Deng W, Jin L, Zhang B, et al. A flexible field-limited ordered ZnO nanorod-based self-powered tactile sensor array for electronic skin. Nanoscale 2016, 8: 16302–16306.
[102]
Kawano T, Nagao K, Hashimoto K. Preparation and properties of lanthanum lead zirconate titanate thin films by hydrothermal method. Integr Ferroelectr 1996, 12: 263–273.
[103]
Slimani Tlemcani T, Justeau C, Nadaud K, et al. Deposition time and annealing effects of ZnO seed layer on enhancing vertical alignment of piezoelectric ZnO nanowires. Chemosensors 2019, 7: 7.
[104]
Fraleoni-Morgera A, Cesini I, Kumar P, et al. Hydrothermally grown ZnO nanorods as promising materials for low cost electronic skin. ChemNanoMat 2020, 6: 15–31.
[105]
Ohta K, Isobe G, Bornmann P, et al. Study on optimizing ultrasonic irradiation period for thick polycrystalline PZT film by hydrothermal method. Ultrasonics 2013, 53: 837–841.
[106]
Li X, Wang YH, Zhao C, et al. Paper-based piezoelectric touch pads with hydrothermally grown zinc oxide nanowires. ACS Appl Mater Inter 2014, 6: 22004–22012.
[107]
Zhou Z, Tang HX, Sodano HA. Vertically aligned arrays of BaTiO3 nanowires. ACS Appl Mater Inter 2013, 5: 11894–11899.
[108]
Wang Z, Hu YM, Wang W, et al. Electromechanical conversion behavior of K0.5Na0.5NbO3 nanorods synthesized by hydrothermal method. Integr Ferroelectr 2013, 142: 24–30.
[109]
Xiao JX, Ong WL, Guo ZM, et al. Resistive switching and polarization reversal of hydrothermal-method-grown undoped zinc oxide nanorods by using scanning probe microscopy techniques. ACS Appl Mater Inter 2015, 7: 11412–11422.
[110]
Xu Y, Yu Q, Li JF. A facile method to fabricate vertically aligned (K,Na)NbO3 lead-free piezoelectric nanorods. J Mater Chem 2012, 22: 23221–23226.
[111]
Kanda T, Kurosawa MK, Yasui H, et al. Performance of hydrothermal PZT film on high intensity operation. Sens Actuat A-Phys 2001, 89: 16–21.
[112]
Rafique S, Kasi AK, Aminullah, et al. Fabrication of Br doped ZnO nanosheets piezoelectric nanogenerator for pressure and position sensing applications. Curr Appl Phys 2021, 21: 72–79.
[113]
Xu S, Hansen BJ, Wang ZL. Piezoelectric-nanowire-enabled power source for driving wireless microelectronics. Nat Commun 2010, 1: 93.
[114]
Ou CL, Sanchez-Jimenez PE, Datta A, et al. Template-assisted hydrothermal growth of aligned zinc oxide nanowires for piezoelectric energy harvesting applications. ACS Appl Mater Inter 2016, 8: 13678–13683.
[115]
Shirley JA, Florence SE, Sreeja BS, et al. Zinc oxide nanostructure-based textile pressure sensor for wearable applications. J Mater Sci-Mater El 2020, 31: 16519–16530.
[116]
Khan A, Hussain M, Nur O, et al. Fabrication of zinc oxide nanoneedles on conductive textile for harvesting piezoelectric potential. Chem Phys Lett 2014, 612: 62–67.
[117]
Deng WL, Yang T, Jin L, et al. Cowpea-structured PVDF/ZnO nanofibers based flexible self-powered piezoelectric bending motion sensor towards remote control of gestures. Nano Energy 2019, 55: 516–525.
[118]
Xue JJ, Wu T, Dai YQ, et al. Electrospinning and electrospun nanofibers: Methods, materials, and applications. Chem Rev 2019, 119: 5298–5415.
[119]
Pillay V, Dott C, Choonara YE, et al. A review of the effect of processing variables on the fabrication of electrospun nanofibers for drug delivery applications. J Nanomater 2013, 2013: 1–22.
[120]
Okutan N, Terzi P, Altay F. Affecting parameters on electrospinning process and characterization of electrospun gelatin nanofibers. Food Hydrocoll 2014, 39: 19–26.
[121]
Chen YQ, Zheng XJ, Feng X. The fabrication of vanadium-doped ZnO piezoelectric nanofiber by electrospinning. Nanotechnology 2010, 21: 055708.
[122]
Xu SY, Shi Y, Kim SG. Fabrication and mechanical property of nano piezoelectric fibres. Nanotechnology 2006, 17: 4497–4501.
[123]
Yun JS, Park CK, Cho JH, et al. The effect of PVP contents on the fiber morphology and piezoelectric characteristics of PZT nanofibers prepared by electrospinning. Mater Lett 2014, 137: 178–181.
[124]
Xu SY, Poirier G, Yao N. Fabrication and piezoelectric property of PMN–PT nanofibers. Nano Energy 2012, 1: 602–607.
[125]
Wu WW, Cheng L, Bai S, et al. Electrospinning lead-free 0.5Ba(Zr0.2Ti0.8)O3–0.5(Ba0.7Ca0.3)TiO3 nanowires and their application in energy harvesting. J Mater Chem A 2013, 1: 7332–7338.
[126]
Yan JH, Han YH, Xia SH, et al. Polymer template synthesis of flexible BaTiO3 crystal nanofibers. Adv Funct Mater 2019, 29: 1907919.
[127]
Park S, Kwon Y, Sung M, et al. Poling-free spinning process of manufacturing piezoelectric yarns for textile applications. Mater Design 2019, 179: 107889.
[128]
Pan CT, Yen CK, Wu HC, et al. Significant piezoelectric and energy harvesting enhancement of poly(vinylidene fluoride)/polypeptide fiber composites prepared through near-field electrospinning. J Mater Chem A 2015, 3: 6835–6843.
[129]
Nakashima R, Watanabe K, Lee YJ, et al. Mechanical properties of poly(vinylidene fluoride) nanofiber filaments prepared by electrospinning and twisting. Adv Polym Tech 2013, 32: E44–E52.
[130]
Drezner Y, Nitzani M, Berger S. Piezoelectric ultrathin BaTiO3 films. Appl Phys Lett 2005, 86: 042906.
[131]
Stoeckel C, Kaufmann C, Hahn R, et al. Pulsed DC magnetron sputtered piezoelectric thin film aluminum nitride—Technology and piezoelectric properties. J Appl Phys 2014, 116: 034102.
[132]
Matsuo H, Kawai Y, Esashi M. Novel design for optical scanner with piezoelectric film deposited by metal organic chemical vapor deposition. Jpn J Appl Phys 2010, 49: 04DL19.
[133]
Aktakka EE, Peterson RL, Najafi K. Wafer-level integration of high-quality bulk piezoelectric ceramics on silicon. IEEE T Electron Dev 2013, 60: 2022–2030.
[134]
Abinaya M, Dhanisha KM, Cristopher M, et al. Reactive DC magnetron sputtered ZnO thin films for piezoelectric application. Int J Nanosci 2018, 17: 1760047.
[135]
Cheng HE, Lin TC, Chen WC. Preparation of [002] oriented AlN thin films by mid frequency reactive sputtering technique. Thin Solid Films 2003, 425: 85–89.
[136]
Chen JY, Zhang HT, Chen Q, et al. Stable p-type nitrogen-doped zinc oxide films prepared by magnetron sputtering. Vacuum 2020, 180: 109576.
[137]
Lu Y, Reusch M, Kurz N, et al. Surface morphology and microstructure of pulsed DC magnetron sputtered piezoelectric AlN and AlScN thin films. Phys Status Solidi A 2018, 215: 1700559.
[138]
Sharma P, Guler Z, Jackson N. Development and characterization of confocal sputtered piezoelectric zinc oxide thin film. Vacuum 2021, 184: 109930.
[139]
Condorelli GG, Catalano MR, Smecca E, et al. Piezoelectric domains in BiFeO3 films grown via MOCVD: Structure/property relationship. Surf Coat Technol 2013, 230: 168–173.
[140]
Montenegro DN, Souissi A, Martínez-Tomás C, et al. Morphology transitions in ZnO nanorods grown by MOCVD. J Cryst Growth 2012, 359: 122–128.
[141]
Bak SJ, Mun DH, Jung KC, et al. Effect of Al pre-deposition on AlN buffer layer and GaN film grown on Si(111) substrate by MOCVD. Electron Mater Lett 2013, 9: 367–370.
[142]
Yao HH, Lin CF, Kuo HC, et al. MOCVD growth of AlN/GaN DBR structures under various ambient conditions. J Cryst Growth 2004, 262: 151–156.
[143]
Pan M, Fenwick WE, Strassburg M, et al. Metal–organic chemical vapor deposition of ZnO. J Cryst Growth 2006, 287: 688–693.
[144]
Rogé V, Guignard C, Lamblin G, et al. Photocatalytic degradation behavior of multiple xenobiotics using MOCVD synthesized ZnO nanowires. Catal Today 2018, 306: 215–222.
[145]
Al Tahtamouni TM, Lin JY, Jiang HX. High quality AlN grown on double layer AlN buffers on SiC substrate for deep ultraviolet photodetectors. Appl Phys Lett 2012, 101: 192106.
[146]
Chen Z, Newman S, Brown D, et al. High quality AlN grown on SiC by metal organic chemical vapor deposition. Appl Phys Lett 2008, 93: 191906.
[147]
Bui QC, Ardila G, Sarigiannidou E, et al. Morphology transition of ZnO from thin film to nanowires on silicon and its correlated enhanced zinc polarity uniformity and piezoelectric responses. ACS Appl Mater Inter 2020, 12: 29583–29593.
[148]
Janphuang P, Lockhart R, Uffer N, et al. Vibrational piezoelectric energy harvesters based on thinned bulk PZT sheets fabricated at the wafer level. Sens Actuat A-Phys 2014, 210: 1–9.
[149]
Yi ZR, Zhang WM, Yang B. Flexible piezo-MEMS fabrication process based on thinned piezoelectric thick film. In: Proceeding of the 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), Gainesville, USA, 2021: 670–673.
[150]
Hwang GT, Annapureddy V, Han JH, et al. Self-powered wireless sensor node enabled by an aerosol-deposited PZT flexible energy harvester. Adv Energy Mater 2016, 6: 1600237.
[151]
Cibert C, Dutheil P, Champeaux C, et al. Piezoelectric characteristic of nanocrystalline AlN films obtained by pulsed laser deposition at room temperature. Appl Phys Lett 2010, 97: 251906.
[152]
Wang P, Song CK, Wang XF, et al. Anisotropic piezoelectric response from InGaN nanowires with spatially modulated composition and topography over a textured Si(100) substrate. ACS Appl Mater Inter 2021, 13: 7517–7528
[153]
Liu YJ, Li ZL, Yang Z, et al. Novel design and performance of the solidly mounted resonator with an AlN-buffered ZnO piezoelectric film. Vacuum 2018, 154: 11–17.
[154]
Liu YM, Wang LY, Zhao L, et al. Recent progress on flexible nanogenerators toward self-powered systems. InfoMat 2020, 2: 318–340.
[155]
Fan FR, Tang W, Wang ZL. Flexible nanogenerators for energy harvesting and self-powered electronics. Adv Mater 2016, 28: 4283–4305.
[156]
Dagdeviren C, Yang BD, Su YW, et al. Conformal piezoelectric energy harvesting and storage from motions of the heart, lung, and diaphragm. PNAS 2014, 111: 1927–1932.
[157]
Lan S, Pan H, Lin YH. Fabrication and applications of flexible inorganic ferroelectric thin films. Acta Phys Sin 2020, 69: 217708. (in Chinese)
[158]
Wang D, Yuan GL, Hao GQ, et al. All-inorganic flexible piezoelectric energy harvester enabled by two-dimensional mica. Nano Energy 2018, 43: 351–358.
[159]
Jeong CK, Han JH, Palneedi H, et al. Comprehensive biocompatibility of nontoxic and high-output flexible energy harvester using lead-free piezoceramic thin film. APL Mater 2017, 5: 074102.
[160]
Harada R, Iwamoto N, Kweon SH, et al. Finger flexion power generators made of piezoelectric lead zirconate titanate thin films on stainless steel foils. Sens Actuat A-Phys 2021, 322: 112617.
[161]
Ko YJ, Kim DY, Won SS, et al. Flexible Pb(Zr0.52Ti0.48)O3 films for a hybrid piezoelectric-pyroelectric nanogenerator under harsh environments. ACS Appl Mater Inter 2016, 8: 6504–6511.
[162]
Lee SM, Bae SH, Lin L, et al. Super-flexible nanogenerator for energy harvesting from gentle wind and as an active deformation sensor. Adv Funct Mater 2013, 23: 2445–2449.
[163]
Akiyama M, Morofuji Y, Kamohara T, et al. Flexible piezoelectric pressure sensors using oriented aluminum nitride thin films prepared on polyethylene terephthalate films. J Appl Phys 2006, 100: 114318.
[164]
Yang DC, Qiu Y, Jiang QY, et al. Patterned growth of ZnO nanowires on flexible substrates for enhanced performance of flexible piezoelectric nanogenerators. Appl Phys Lett 2017, 110: 063901.
[165]
Algieri L, Todaro MT, Guido F, et al. Flexible piezoelectric energy-harvesting exploiting biocompatible AlN thin films grown onto spin-coated polyimide layers. ACS Appl Energy Mater 2018, 1: 5203–5210.
[166]
Ma CH, Lin JC, Liu HJ, et al. Van der Waals epitaxy of functional MoO2 film on mica for flexible electronics. Appl Phys Lett 2016, 108: 253104.
[167]
Yu XG, Wang HL, Ning X, et al. Needle-shaped ultrathin piezoelectric microsystem for guided tissue targeting via mechanical sensing. Nat Biomed Eng 2018, 2: 165–172.
[168]
Chen Y, Zhang Y, Yuan FF, et al. A flexible PMN–PT ribbon-based piezoelectric–pyroelectric hybrid generator for human-activity energy harvesting and monitoring. Adv Electron Mater 2017, 3: 1600540.
[169]
Qi Y, Jafferis NT, Lyons K Jr, et al. Piezoelectric ribbons printed onto rubber for flexible energy conversion. Nano Lett 2010, 10: 524–528.
[170]
Hwang GT, Park H, Lee JH, et al. Self-powered cardiac pacemaker enabled by flexible single crystalline PMN–PT piezoelectric energy harvester. Adv Mater 2014, 26: 4880–4887.
[171]
Wu WW, Bai S, Yuan MM, et al. Lead zirconate titanate nanowire textile nanogenerator for wearable energy-harvesting and self-powered devices. ACS Nano 2012, 6: 6231–6235.
[172]
Yang ZB, Zhou SX, Zu J, et al. High-performance piezoelectric energy harvesters and their applications. Joule 2018, 2: 642–697.
[173]
Thakre A, Kumar A, Song HC, et al. Pyroelectric energy conversion and its applications—Flexible energy harvesters and sensors. Sensors 2019, 19: 2170.
[174]
Yao DS, Cui HC, Hensleigh R, et al. Achieving the upper bound of piezoelectric response in tunable, wearable 3D printed nanocomposites. Adv Funct Mater 2019, 29: 1903866.
[175]
Hong Y, Wang B, Long ZH, et al. Hierarchically interconnected piezoceramic textile with a balanced performance in piezoelectricity, flexibility, toughness, and air permeability. Adv Funct Mater 2021, 31: 2104737.
[176]
Seo MH, Yoo JY, Choi SY, et al. Versatile transfer of an ultralong and seamless nanowire array crystallized at high temperature for use in high-performance flexible devices. ACS Nano 2017, 11: 1520–1529.
[177]
Yu D, Zheng ZP, Liu JD, et al. Superflexible and lead-free piezoelectric nanogenerator as a highly sensitive self-powered sensor for human motion monitoring. Nano-Micro Lett 2021, 13: 117.
[178]
Zou D, Liu SY, Zhang C, et al. Flexible and translucent PZT films enhanced by the compositionally graded heterostructure for human body monitoring. Nano Energy 2021, 85: 105984.
[179]
Yi ZR, Yang HJ, Tian YW, et al. Self-powered force sensor based on thinned bulk PZT for real-time cutaneous activities monitoring. IEEE Electron Device Lett 2018, 39: 1226–1229.
[180]
Hong Y, Wang B, Lin WK, et al. Highly anisotropic and flexible piezoceramic kirigami for preventing joint disorders. Sci Adv 2021, 7: eabf0795.
[181]
Gao XY, Yang JK, Wu JG, et al. Piezoelectric actuators and motors: Materials, designs, and applications. Adv Mater Technol 2020, 5: 1900716.
[182]
Mohith S, Upadhya AR, Navin KP, et al. Recent trends in piezoelectric actuators for precision motion and their applications: A review. Smart Mater Struct 2021, 30: 013002.
[183]
Dong HJ, Li TJ, Wang ZW, et al. Design and experiment of a piezoelectric actuator based on inchworm working principle. Sens Actuat A-Phys 2020, 306: 111950.
[184]
Ming AG, Hashimoto K, Zhao WJ, et al. Fundamental analysis for design and control of soft fish robots using piezoelectric fiber composite. In: Proceedings of the 2013 IEEE International Conference on Mechatronics and Automation, Takamatsu, Japan, 2013: 219–224.
[185]
Jeong CK. Toward bioimplantable and biocompatible flexible energy harvesters using piezoelectric ceramic materials. MRS Commun 2020, 10: 365–378.
[186]
Kim DH, Shin HJ, Lee H, et al. In vivo self-powered wireless transmission using biocompatible flexible energy harvesters. Adv Funct Mater 2017, 27: 1700341.
[187]
Lu BW, Chen Y, Ou DP, et al. Ultra-flexible piezoelectric devices integrated with heart to harvest the biomechanical energy. Sci Rep 2015, 5: 16065.
[188]
Zhang YZ, Wu MJ, Zhu QY, et al. Performance enhancement of flexible piezoelectric nanogenerator via doping and rational 3D structure design for self-powered mechanosensational system. Adv Funct Mater 2019, 29: 1904259.
[189]
Wang YT, Wang L, Cheng TH, et al. Sealed piezoelectric energy harvester driven by hyperbaric air load. Appl Phys Lett 2016, 108: 033902.
[190]
Makki N, Pop-Iliev R. Battery-and wire-less tire pressure measurement systems (TPMS) sensor. Microsyst Technol 2012, 18: 1201–1212.
[191]
Yang B, Yi ZR, Tang G, et al. A gullwing-structured piezoelectric rotational energy harvester for low frequency energy scavenging. Appl Phys Lett 2019, 115: 063901.
[192]
Yi ZR, Yang B, Zhang WM, et al. Batteryless tire pressure real-time monitoring system driven by an ultralow frequency piezoelectric rotational energy harvester. IEEE T Ind Electron 2021, 68: 3192–3201.
[193]
Wang YL, Yang ZB, Li PY, et al. Energy harvesting for jet engine monitoring. Nano Energy 2020, 75: 104853.
[194]
Zhang XY, Wang Y, Shi XN, et al. Heteroepitaxy of flexible piezoelectric Pb(Zr0.53Ti0.47)O3 sensor on inorganic mica substrate for Lamb wave-based structural health monitoring. Ceram Int 2021, 47: 13156–13163.
Journal of Advanced Ceramics
Pages 433-462
Cite this article:
Zhen L, Lu L, Yao Y, et al. Flexible inorganic piezoelectric functional films and their applications. Journal of Advanced Ceramics, 2023, 12(3): 433-462. https://doi.org/10.26599/JAC.2023.9220691

2912

Views

709

Downloads

9

Crossref

9

Web of Science

5

Scopus

0

CSCD

Altmetrics

Received: 01 August 2022
Revised: 30 October 2022
Accepted: 31 October 2022
Published: 22 February 2023
© The Author(s) 2022.

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made.

The images or other third party material in this article are included in the article’s Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder.

To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/.

Return