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This study presents a tiny pressure sensor which is used to measure the Intracranial Pressure (ICP). The sensor is based on the piezoresistive effect. The piezoresistive pressure sensor is simulated and designed by using nonlinear programming optimizing and Finite Element Analysis (FEA) tools. Two kinds of sensor sizes are designed in the case of childhood and adult. The sensors are fabricated by Microelectro Mechanical Systems (MEMS) process. The test results yield sensitivities of 1.033 ×10 -2 mV/kPa for the childhood type detection and 1.257 ×10 -2 mV/kPa for the adult detection with sensor chip sizes of 0.40 ×0.40 mm 2 and 0.50 ×0.50 mm 2, respectively. A novel method for measuring ICP is proposed because of the tiny sizes. Furthermore, relative errors for sensitivity of pressure sensors are limited within 4.76%. Minimum Detectable Pressure (MDP) reaches 128.4 Pa in average.


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Tiny MEMS-Based Pressure Sensors in the Measurement of Intracranial Pressure

Show Author's information Yanhang ZhangZhaohua ZhangBo PangLi YuanTianling Ren ( )
Institute of Microelectronics, Tsinghua University, Beijing 100084, China
Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences, Beijing 100083, China

Abstract

This study presents a tiny pressure sensor which is used to measure the Intracranial Pressure (ICP). The sensor is based on the piezoresistive effect. The piezoresistive pressure sensor is simulated and designed by using nonlinear programming optimizing and Finite Element Analysis (FEA) tools. Two kinds of sensor sizes are designed in the case of childhood and adult. The sensors are fabricated by Microelectro Mechanical Systems (MEMS) process. The test results yield sensitivities of 1.033 ×10 -2 mV/kPa for the childhood type detection and 1.257 ×10 -2 mV/kPa for the adult detection with sensor chip sizes of 0.40 ×0.40 mm 2 and 0.50 ×0.50 mm 2, respectively. A novel method for measuring ICP is proposed because of the tiny sizes. Furthermore, relative errors for sensitivity of pressure sensors are limited within 4.76%. Minimum Detectable Pressure (MDP) reaches 128.4 Pa in average.

Keywords: intracranial pressure, tiny sensors, finite element analysis

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Received: 18 February 2014
Revised: 24 February 2014
Accepted: 25 February 2014
Published: 15 April 2014
Issue date: April 2014

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© The author(s) 2014

Acknowledgements

This work was supported by the National Natural Science Foundation of China (Nos. 61025021 and 61020106006), and the National Key Projects of Science and Technology of China (No. 2011ZX02403-002).

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