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Topical Review | Open Access

Recent advances in femtosecond direct laser writing of micro-optical imaging components

Minjing Li1Wenbin Chen1ChunSan Deng1Daqian Li1Zhican Ning1Huace Hu1Weiming Wang1Hui Gao1,2 Leimin Deng1,2Wei Xiong1,2 ( )
Wuhan National Laboratory for Optoelectronics, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, People’s Republic of China
Optics Valley Laboratory, Wuhan 430074, People’s Republic of China
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Abstract

The advancement of modern optical imaging systems has generated a substantial demand for precision-engineered imaging components with complex functionalities. Despite various micro-nanofabrication techniques demonstrating significant advantages over traditional methods, critical challenges persist in achieving nanoscale resolution and freely designed intricate micro-optical structures. Femtosecond direct laser writing (FsDLW) emerges as a pivotal solution to these challenges, facilitating the fabrication of sophisticated architectures that transcend the diffraction limit through nonlinear multiphoton absorption. This technique processes exceptional capabilities, including extensive material compatibility, versatile micro-nanoscale fabrication, and true three-dimensional structuring. To date, FsDLW has been successfully employed in the manufacturing of diverse micro-optical imaging components. This review systematically elucidates the fundamental methodologies of FsDLW applicable to micro-optical device fabrication, alongside a comprehensive overview of the relevant material systems. Furthermore, recent advancements in micro-optical imaging devices and their emerging applications are critically assessed. Finally, we provide a prospective analysis of unresolved challenges and future research directions for imaging optical components.

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International Journal of Extreme Manufacturing

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Cite this article:
Li M, Chen W, Deng C, et al. Recent advances in femtosecond direct laser writing of micro-optical imaging components. International Journal of Extreme Manufacturing, 2026, 8(2). https://doi.org/10.1088/2631-7990/ae22a8

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Received: 19 June 2025
Revised: 11 August 2025
Accepted: 21 November 2025
Published: 29 December 2025
© 2025 The Author(s).

Original content from this work may be used under the terms of the Creative Commons Attribution 4.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.