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Perspective | Open Access

Material manufacturing from atomic layer

School of Advanced Materials, Shenzhen Graduate School, Peking University, Shenzhen 518055, People’s Republic of China
School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430070, People’s Republic of China
Institut National de la Recherche Scientifique (INRS), Centre Énergie Matériaux Télécommunications, Varennes, Québec J3X 1P7, Canada
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Abstract

Atomic scale engineering of materials and interfaces has become increasingly important in material manufacturing. Atomic layer deposition (ALD) is a technology that can offer many unique properties to achieve atomic-scale material manufacturing controllability. Herein, we discuss this ALD technology for its applications, attributes, technology status and challenges. We envision that the ALD technology will continue making significant contributions to various industries and technologies in the coming years.

Keywords

atomic-scale manufacturingatomic layer depositionarea selective depositionapplications

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International Journal of Extreme Manufacturing
Volume 5 Issue 4,
December 2023
Article number: 043001
DOI: 10.1088/2631-7990/acf3b8

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Cite this article:
Wang X, Chen R, Sun S. Material manufacturing from atomic layer. International Journal of Extreme Manufacturing, 2023, 5(4): 043001. https://doi.org/10.1088/2631-7990/acf3b8

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Published: 13 September 2023
© 2023 The Author(s).

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