Highlights
• The as-deposited NbMoTaW based solar absorber coating exhibits a good spectral selectivity of 0.938/0.086.
• The NbMoTaWN and NbMoTaWON films show metallic properties and can be used as intrinsic absorption layers.
• The coating possesses excellent thermal stability, which can be stabilized at 400 ℃ in air and 600 ℃ in vacuum for 2 h.
• The coating has good optical properties after being soaked in a 3.5% NaCl solution for 30 d.

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