Tribological properties of platinum/ruthenium/nitrogen doped diamond-like carbon thin films deposited with different negative substrate biases

Nay Win KHUN; Erjia LIU

doi:10.1007/s40544-014-0059-x

Friction 2014, 2(4): 317-329 https://doi.org/10.1007/s40544-014-0059-x

Research Article |

Open Access | Issue | Published: 25 August 2014

Tribological properties of platinum/ruthenium/nitrogen doped diamond-like carbon thin films deposited with different negative substrate biases

Show Author's Information Hide Author's Information Nay Win KHUN, Erjia LIU(

)

School of Mechanical and Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore

Keywords:

friction, wear, adhesion, DC magnetron sputtering, PtRuN-DLC film

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KHUN NW, LIU E. Tribological properties of platinum/ruthenium/nitrogen doped diamond-like carbon thin films deposited with different negative substrate biases. Friction, 2014, 2(4): 317-329. https://doi.org/10.1007/s40544-014-0059-x

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Abstract

The platinum/ruthenium/nitrogen doped diamond-like carbon (PtRuN-DLC) thin films were deposited on Si substrates via DC magnetron sputtering by varying negative substrate bias. The tribological performance of the PtRuN-DLC films was systematically investigated using ball-on-disc microtribological test. The Raman results showed that the increased negative substrate bias significantly increased the number of sp³ bonds in the PtRuN-DLC films as a result of the increased kinetic energies of impinging ions. The adhesion strength of the PtRuN-DLC films apparently decreased with increased negative substrate bias due to the promoted residual stress in the films. The tribological results clearly revealed that the increased negative substrate bias decreased the friction and wear of the PtRuN-DLC films by improving the sp³ bonded cross-linking structures of the films. It can be concluded that the PtRuN-DLC films could effectively prevent their underlying Si substrates from wear as the negative substrate bias had a significant influence on the tribological properties of the PtRuN-DLC films.

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Tribological properties of platinum/ruthenium/nitrogen doped diamond-like carbon thin films deposited with different negative substrate biases

Show Author's information Hide Author's Information Nay Win KHUN, Erjia LIU(

)

School of Mechanical and Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore

Abstract

Keywords: friction, wear, adhesion, DC magnetron sputtering, PtRuN-DLC film

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Publication history

Received: 30 March 2014

Revised: 19 May 2014

Accepted: 06 June 2014

Published: 25 August 2014

Issue date: December 2014

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