Hydrophobic, mechanical, and tribological properties of fluorine incorporated hydrogenated fullerene-like carbon films

Li QIANG; Bin ZHANG; Kaixiong GAO; Zhenbin GONG; Junyan ZHANG

doi:10.1007/s40544-013-0031-1

Friction 2013, 1(4): 350-358 https://doi.org/10.1007/s40544-013-0031-1

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Open Access | Issue | Published: 23 November 2013

Hydrophobic, mechanical, and tribological properties of fluorine incorporated hydrogenated fullerene-like carbon films

Show Author's Information Hide Author's Information Li QIANG, Bin ZHANG, Kaixiong GAO, Zhenbin GONG, Junyan ZHANG(

)

State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China

Keywords:

tribological performance, mechanical properties, fullerene-like carbon film, fluorine doping, hydrophobicity

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QIANG L, ZHANG B, GAO K, et al. Hydrophobic, mechanical, and tribological properties of fluorine incorporated hydrogenated fullerene-like carbon films. Friction, 2013, 1(4): 350-358. https://doi.org/10.1007/s40544-013-0031-1

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Abstract

Fluorine-incorporated hydrogenated fullerene-like nanostructure amorphous carbon films (F-FLC) were synthesized by employing the direct current plasma enhanced chemical vapor deposition (dc-PECVD) technique using a mixture of methane (CH₄), tetra-fluoromethane (CF₄), and hydrogen (H₂) as the working gases. The effect of the fluorine content on the bonding structure, surface roughness, hydrophobic, mechanical, and tribological properties of the films was systematically investigated using Fourier transform infrared spectroscopy (FTIR), X-ray photoelectron spectroscopy (XPS), Raman analysis, atomic force microscope (AFM), contact angle goniometer, nano-indenter, and reciprocating ball-on-disc tester, respectively. The fluorine content in the films increased from 0 to 2.1 at.% as the CF₄ gas flow ratio increased from 0 to 3 sccm, and incorporated fluorine atoms existed in the form of C–F_X (X = 1, 2, 3) bonds in the film. The fullerene nanostructure embedded in the hydrogenated amorphous carbon films was confirmed by Raman analysis. The water contact angle was significantly increased because of fluorine doping, which indicates that the hydrophobicity of the carbon films could be adjusted to some extent by the fluorine doping. The hardness and elastic modulus of the films remained relatively high (22 GPa) as the fluorine content increased. Furthermore, the friction coefficient of the carbon films was significantly reduced and the wear resistance was enhanced by fluorine doping.

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Hydrophobic, mechanical, and tribological properties of fluorine incorporated hydrogenated fullerene-like carbon films

Show Author's information Hide Author's Information Li QIANG, Bin ZHANG, Kaixiong GAO, Zhenbin GONG, Junyan ZHANG(

)

State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China

Abstract

Keywords: tribological performance, mechanical properties, fullerene-like carbon film, fluorine doping, hydrophobicity

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Acknowledgements

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Publication history

Received: 20 June 2013

Revised: 07 September 2013

Accepted: 25 October 2013

Published: 23 November 2013

Issue date: December 2013

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Acknowledgements

The authors are grateful to the National Key Basic Research and Development (973) Program of China (Grant No. 2013CB632300) and the National Natural Science Foundation of China (Grant Nos. 51275508 and 51205383) and the Ministry of Science and Technology of China (Grant No. 2010DFA63610) for financial support.

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