Spatial evolution of friction of a textured wafer surface

Huaping XIAO; Ke WANG; Grant FOX; Michel BELIN; Julien FONTAINE; Hong LIANG

doi:10.1007/s40544-013-0008-0

Friction 2013, 1(1): 92-97 https://doi.org/10.1007/s40544-013-0008-0

Research Article |

Open Access | Issue | Published: 26 March 2013

Spatial evolution of friction of a textured wafer surface

Show Author's Information Hide Author's Information Huaping XIAO^{¹^,^a}, Ke WANG^{²^,^a}, Grant FOX^{¹^,^a}, Michel BELIN^³, Julien FONTAINE^³, Hong LIANG^{¹^,²^,^*}(

)

¹ Mechanical Engineering, Texas A&M University, College Station, Texas 77843, USA

² Materials Science and Engineering, Texas A&M University, College Station, Texas 77843, USA

³ Ecole Centrale de Lyon/CNRS-UMR 5513, France

^a Xiao, Wang, and Fox contributed equally to this work.

Keywords:

friction, micro-electro-mechanical systems (MEMS), patterned wafers, transfer wear, electrical contact resistance

Cite this article:

XIAO H, WANG K, FOX G, et al. Spatial evolution of friction of a textured wafer surface. Friction, 2013, 1(1): 92-97. https://doi.org/10.1007/s40544-013-0008-0

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Abstract

Mechanical failure of integrated circuits and micro-electro-mechanical systems (MEMS) demands new understanding of friction in small devices. In present research, we demonstrated an in situ approach to measure sliding friction of a patterned surface composing multi-materials and structures. The effects of materials and surface morphology on friction and electrical contact resistance were investigated. The material transfer at the interface of dissimilar materials was found to play dominating roles in friction. The current work provides important insights from the fundamentals of friction that benefit the design of new micro-devices.

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Spatial evolution of friction of a textured wafer surface

Show Author's information Hide Author's Information Huaping XIAO^{¹^,^a}, Ke WANG^{²^,^a}, Grant FOX^{¹^,^a}, Michel BELIN^³, Julien FONTAINE^³, Hong LIANG^{¹^,²^,^*}(

)

¹ Mechanical Engineering, Texas A&M University, College Station, Texas 77843, USA

² Materials Science and Engineering, Texas A&M University, College Station, Texas 77843, USA

³ Ecole Centrale de Lyon/CNRS-UMR 5513, France

^a Xiao, Wang, and Fox contributed equally to this work.

Abstract

Keywords: friction, micro-electro-mechanical systems (MEMS), patterned wafers, transfer wear, electrical contact resistance

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Acknowledgements

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Publication history

Received: 03 January 2013

Revised: 23 February 2013

Accepted: 27 February 2013

Published: 26 March 2013

Issue date: March 2013

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Acknowledgements

This research was in part sponsored by National Science Foundation (NSF) (0535578).

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