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Tantalum pentoxide (Ta2O5) has attracted intensive attention due to their excellent physicochemical properties. Ta2O5 films were synthesized via electron beam evaporation (EBE) and subsequently annealed at different temperatures ranging from 300 to 900 ℃. X-ray diffraction (XRD) results show that amorphous Ta2O5 thin films form from 300 to 700 ℃ and then a phase transition to polycrystalline β-Ta2O5 films occurs since 900 ℃. The surface morphology of the Ta2O5 films is uniform and smooth. The resulted Ta2O5 films exhibit excellent transmittance properties for wavelengths ranging from 300 to 1100 nm. The bandgap of the Ta2O5 films is broadened from 4.32 to 4.46 eV by annealing. The 900 ℃ polycrystalline film electrode has improved electrochemical stability, compared to the other amorphous counterparts.


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Annealing effects on the optical and electrochemical properties of tantalum pentoxide films

Show Author's information Wei RENa( )Guang-Dao YANGbAi-Ling FENGcRui-Xia MIAOaJun-Bo XIAaYong-Gang WANGb
School of Science & School of Electronic Engineering, Xi’an University of Posts & Telecommunications, Xi’an 710121, China
School of Physics and Information Technology, Shaanxi Normal University, Xi’an 710119, China
Institute of Physics & Optoelectronics Technology, Baoji University of Arts and Sciences, Baoji 721016, China

Abstract

Tantalum pentoxide (Ta2O5) has attracted intensive attention due to their excellent physicochemical properties. Ta2O5 films were synthesized via electron beam evaporation (EBE) and subsequently annealed at different temperatures ranging from 300 to 900 ℃. X-ray diffraction (XRD) results show that amorphous Ta2O5 thin films form from 300 to 700 ℃ and then a phase transition to polycrystalline β-Ta2O5 films occurs since 900 ℃. The surface morphology of the Ta2O5 films is uniform and smooth. The resulted Ta2O5 films exhibit excellent transmittance properties for wavelengths ranging from 300 to 1100 nm. The bandgap of the Ta2O5 films is broadened from 4.32 to 4.46 eV by annealing. The 900 ℃ polycrystalline film electrode has improved electrochemical stability, compared to the other amorphous counterparts.

Keywords:

Ta2O5 films, anneal, optical property, electrochemical stability
Received: 27 September 2020 Revised: 25 January 2021 Accepted: 08 February 2021 Published: 05 August 2021 Issue date: August 2021
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Publication history

Received: 27 September 2020
Revised: 25 January 2021
Accepted: 08 February 2021
Published: 05 August 2021
Issue date: August 2021

Copyright

© The Author(s) 2021

Acknowledgements

This work was supported by the Joint Research Funds of Department of Science & Technology of Shaanxi Province and Northwestern Polytechnical University (Grant No. 2020GXLH-Z-029).

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