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Ceramic materials are increasingly used in micro-electro-mechanical systems (MEMS) as they offer many advantages such as high-temperature resistance, high wear resistance, low density, and favourable mechanical and chemical properties at elevated temperature. However, with the emerging of additive manufacturing, the use of ceramics for functional and structural MEMS raises new opportunities and challenges. This paper provides an extensive review of the manufacturing processes used for ceramic-based MEMS, including additive and conventional manufacturing technologies. The review covers the micro-fabrication techniques of ceramics with the focus on their operating principles, main features, and processed materials. Challenges that need to be addressed in applying additive technologies in MEMS include ceramic printing on wafers, post-processing at the micro-level, resolution, and quality control. The paper also sheds light on the new possibilities of ceramic additive micro-fabrication and their potential applications, which indicates a promising future.


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Micro-fabrication of ceramics: Additive manufacturing and conventional technologies

Show Author's information Hany HASSANINa( )Khamis ESSAbAmr ELSHAERcMohamed IMBABYd,eHeba H. EL-MONGYd,fTamer A. EL-SAYEDd,f
School of Engineering, Canterbury Christ Church University, Canterbury, CT1 1QU, UK
University of Birmingham, Edgbaston, B15 2TT, UK
Kingston University London, Penrhyn Road, Kingston Upon Thames, Surrey, KT1 2EE, UK
Department of Mechanical Design, Faculty of Engineering, Mataria, Helwan University, P. O. Box. 11718, Cairo, Egypt
Jubail University College, Mechanical Engineering, Kingdom of Saudi Arabia
Center for Applied Dynamics Research (CADR), School of Engineering, University of Aberdeen, Aberdeen, AB24 3UE, UK

Abstract

Ceramic materials are increasingly used in micro-electro-mechanical systems (MEMS) as they offer many advantages such as high-temperature resistance, high wear resistance, low density, and favourable mechanical and chemical properties at elevated temperature. However, with the emerging of additive manufacturing, the use of ceramics for functional and structural MEMS raises new opportunities and challenges. This paper provides an extensive review of the manufacturing processes used for ceramic-based MEMS, including additive and conventional manufacturing technologies. The review covers the micro-fabrication techniques of ceramics with the focus on their operating principles, main features, and processed materials. Challenges that need to be addressed in applying additive technologies in MEMS include ceramic printing on wafers, post-processing at the micro-level, resolution, and quality control. The paper also sheds light on the new possibilities of ceramic additive micro-fabrication and their potential applications, which indicates a promising future.

Keywords:

micro-electro-mechanical system (MEMS), micro-fabrication, ceramics, micro parts, additive manufacturing
Received: 07 June 2020 Revised: 31 August 2020 Accepted: 09 September 2020 Published: 18 January 2021 Issue date: February 2021
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Received: 07 June 2020
Revised: 31 August 2020
Accepted: 09 September 2020
Published: 18 January 2021
Issue date: February 2021

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