Journal Home > Volume 9 , Issue 3

Pressure measurement with excellent stability and long time durability is highly desired, especially at high temperature and harsh environments. A polymer-derived silicoboron carbonitride (SiBCN) ceramic pressure sensor with excellent stability, accuracy, and repeatability is designed based on the giant piezoresistivity of SiBCN ceramics. The SiBCN ceramic sensor was packaged in a stainless steel case and tested using half Wheatstone bridge with the uniaxial pressure up to 10 MPa. The SiBCN ceramic showed a remarkable piezoresistive effect with the gauge factor (K) as high as 5500. The output voltage of packed SiBCN ceramic sensor changes monotonically and smoothly versus external pressure. The as received SiBCN pressure sensor possesses features of short response time, excellent repeatability, stability, sensitivity, and accuracy. Taking the excellent high temperature thermo-mechanical properties of polymer-derived SiBCN ceramics (e.g., high temperature stability, oxidation/corrosion resistance) into account, SiBCN ceramic sensor has significant potential for pressure measurement at high temperature and harsh environments.


menu
Abstract
Full text
Outline
About this article

Polymer-derived SiBCN ceramic pressure sensor with excellent sensing performance

Show Author's information Gang SHAOa( )Junpeng JIANGaMingjie JIANGaJie SUaWen LIUa( )Hailong WANGaHongliang XUaHongxia LUaRui ZHANGa,b
School of Materials Science and Engineering, Zhengzhou University, Zhengzhou 450001, China
Provincial Key Laboratory of Aviation Materials and Application Technology, Zhengzhou University of Aeronautics, Zhengzhou 450046, China

Abstract

Pressure measurement with excellent stability and long time durability is highly desired, especially at high temperature and harsh environments. A polymer-derived silicoboron carbonitride (SiBCN) ceramic pressure sensor with excellent stability, accuracy, and repeatability is designed based on the giant piezoresistivity of SiBCN ceramics. The SiBCN ceramic sensor was packaged in a stainless steel case and tested using half Wheatstone bridge with the uniaxial pressure up to 10 MPa. The SiBCN ceramic showed a remarkable piezoresistive effect with the gauge factor (K) as high as 5500. The output voltage of packed SiBCN ceramic sensor changes monotonically and smoothly versus external pressure. The as received SiBCN pressure sensor possesses features of short response time, excellent repeatability, stability, sensitivity, and accuracy. Taking the excellent high temperature thermo-mechanical properties of polymer-derived SiBCN ceramics (e.g., high temperature stability, oxidation/corrosion resistance) into account, SiBCN ceramic sensor has significant potential for pressure measurement at high temperature and harsh environments.

Keywords: polymer-derived ceramics (PDCs), silicoboron carbonitride (SiBCN) ceramic pressure sensor, piezoresistivity, high temperature and harsh environment sensor

References(33)

[1]
G Smith. The application of microtechnology to sensors for the automotive industry. Microelectron J 1997, 28: 371-379.
[2]
SJ Prosser. Advances in sensors for aerospace applications. Sensor Actuat A: Phys 1993, 37-38: 128-134.
[3]
TT Tung, C Robert, M Castro, et al. Enhancing the sensitivity of graphene/polyurethane nanocomposite flexible piezo- resistive pressure sensors with magnetite nano-spacers. Carbon 2016, 108: 450-460.
[4]
SJ Park, J Kim, M Chu, et al. Flexible piezoresistive pressure sensor using wrinkled carbon nanotube thin films for human physiological signals. Adv Mater Technol 2018, 3: 1700158.
[5]
H Liu, MY Dong, WJ Huang, et al. Lightweight conductive graphene/thermoplastic polyurethane foams with ultrahigh compressibility for piezoresistive sensing. J Mater Chem C 2017, 5: 73-83.
[6]
F Masheeb, S Stefanescu, AA Ned, et al. Leadless sensor packaging for high temperature applications. In Technical Digest. MEMS IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems. Las Vegas, NV, USA: IEEE, 2002: 392-395.
[7]
M Li, HX Tang, ML Roukes. Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high- frequency applications. Nat Nanotech 2007, 2: 114-120.
[8]
AM Zaitsev, M Burchard, J Meijer, et al. Diamond pressure and temperature sensors for high-pressure high-temperature applications. Phys Stat Sol (a) 2001, 185: 59-64.
DOI
[9]
AA Ned, RS Okojie, AD Kurtz. 6H-SiC pressure sensor operation at 600 ℃. In 1998 Fourth International High Temperature Electronics Conference. Albuquerque, NM, USA: IEEE, 1998: 257-260.
[10]
AD Kurtz, AA Ned. Hermetically sealed ultra high temperature silicon carbide pressure transducers and method for fabricating same. U.S. Patent 6058782, May 2000.
[11]
Y Kervran, O de Sagazan, S Crand, et al. Microcrystalline silicon: Strain gauge and sensor arrays on flexible substrate for the measurement of high deformations. Sensor Actuat A: Phys 2015, 236: 273-280.
[12]
HP Phan, DV Dao, P Tanner, et al. Thickness dependence of the piezoresistive effect in p-type single crystalline 3C-SiC nanothin films. J Mater Chem C 2014, 2: 7176-7179.
[13]
R Riedel, A Kienzle, W Dressler, et al. A silicoboron carbonitride ceramic stable to 2000 ℃. Nature 1996, 382: 796-798.
[14]
YG Wang, LN An, Y Fan, et al. Oxidation of polymer- derived SiAlCN ceramics. J Am Ceram Soc 2005, 88: 3075-3080.
[15]
YG Wang, WF Fei, LN An. Oxidation/corrosion of polymer-derived SiAlCN ceramics in water vapor. J Am Ceram Soc 2006, 89: 1079-1082.
[16]
YG Wang, WF Fei, Y Fan, et al. Silicoaluminum carbonitride ceramic resist to oxidation/corrosion in water vapor. J Mater Res 2006, 21: 1625-1628.
[17]
LG Zhang, YS Wang, Y Wei, et al. A silicon carbonitride ceramic with anomalously high piezoresistivity. J Am Ceram Soc 2008, 91: 1346-1349.
[18]
N Li, YJ Cao, R Zhao, et al. Polymer-derived SiAlOC ceramic pressure sensor with potential for high-temperature application. Sensor Actuat A: Phys 2017, 263: 174-178.
[19]
YJ Cao, XP Yang, R Zhao, et al. Giant piezoresistivity in polymer-derived amorphous SiAlCO ceramics. J Mater Sci 2016, 51: 5646-5650.
[20]
P Colombo, G Mera, R Riedel, et al. Polymer-derived ceramics: 40 years of research and innovation in advanced ceramics. J Am Ceram Soc 2010, 93: 1805-1837.
[21]
SY Fu, M Zhu, YF Zhu. Organosilicon polymer-derived ceramics: An overview. J Adv Ceram 2019, 8: 457-478.
[22]
H Zhao, LX Chen, XG Luan, et al. Synthesis, pyrolysis of a novel liquid SiBCN ceramic precursor and its application in ceramic matrix composites. J Eur Ceram Soc 2017, 37: 1321-1329.
[23]
J Kong, MJ Wang, JH Zou, et al. Soluble and meltable hyperbranched polyborosilazanes toward high-temperature stable SiBCN ceramics. ACS Appl Mater Interfaces 2015, 7: 6733-6744.
[24]
GB Thiyagarajan, R Devasia. Simple and low-cost synthetic route for SiBCN ceramic powder from a boron-modified cyclotrisilazane. J Am Ceram Soc 2019, 102: 476-489.
[25]
S Sarkar, ZH Gan, LN An, et al. Structural evolution of polymer-derived amorphous SiBCN ceramics at high temperature. J Phys Chem C 2011, 115: 24993-25000.
[26]
N Liao, DC Jia, ZH Yang, et al. Enhanced mechanical properties and thermal shock resistance of Si2BC3N ceramics with SiC coated MWCNTs. J Adv Ceram 2019, 8: 121-132.
[27]
AB Kousaalya, R Kumar, S Packirisamy. Characterization of free carbon in the as-thermolyzed Si-B-C-N ceramic from a polyorganoborosilazane precursor. J Adv Ceram 2013, 2: 325-332.
[28]
YH Chen, XP Yang, YJ Cao, et al. Effect of pyrolysis temperature on the electric conductivity of polymer- derived silicoboron carbonitride. J Eur Ceram Soc 2014, 34: 2163-2167.
[29]
PA Ramakrishnan, YT Wang, D Balzar, et al. Silicoboron- carbonitride ceramics: A class of high-temperature, dopable electronic materials. Appl Phys Lett 2001, 78: 3076-3078.
[30]
Q Ding, DW Ni, Z Wang, et al. 3D Cf/SiBCN composites prepared by an improved polymer infiltration and pyrolysis. J Adv Ceram 2018, 7: 266-275.
[31]
WD Kingery, HK Bowen, DR Uhlmann. Introduction to Ceramics. New York, U.S.: John Wiley and Sons, 1976.
[32]
YS Wang, LG Zhang, Y Fan, et al. Stress-dependent piezoresistivity of tunneling-percolation systems. J Mater Sci 2009, 44: 2814-2819.
[33]
YG Wang, J Ding, W Feng, et al. Effect of pyrolysis temperature on the piezoresistivity of polymer-derived ceramics. J Am Ceram Soc 2011, 94: 359-362.
Publication history
Copyright
Acknowledgements
Rights and permissions

Publication history

Received: 27 January 2020
Revised: 04 March 2020
Accepted: 21 March 2020
Published: 05 June 2020
Issue date: June 2020

Copyright

© The Author(s) 2020

Acknowledgements

The authors appreciate the financial support from the National Natural Science Foundation of China (No. U1904180) and Key Scientific Research Projects of High Education Institutions of Henan province (No. 19A430025).

Rights and permissions

This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made.

The images or other third party material in this article are included in the article’s Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder.

To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/.

Return