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Pressure measurement with excellent stability and long time durability is highly desired, especially at high temperature and harsh environments. A polymer-derived silicoboron carbonitride (SiBCN) ceramic pressure sensor with excellent stability, accuracy, and repeatability is designed based on the giant piezoresistivity of SiBCN ceramics. The SiBCN ceramic sensor was packaged in a stainless steel case and tested using half Wheatstone bridge with the uniaxial pressure up to 10 MPa. The SiBCN ceramic showed a remarkable piezoresistive effect with the gauge factor (K) as high as 5500. The output voltage of packed SiBCN ceramic sensor changes monotonically and smoothly versus external pressure. The as received SiBCN pressure sensor possesses features of short response time, excellent repeatability, stability, sensitivity, and accuracy. Taking the excellent high temperature thermo-mechanical properties of polymer-derived SiBCN ceramics (e.g., high temperature stability, oxidation/corrosion resistance) into account, SiBCN ceramic sensor has significant potential for pressure measurement at high temperature and harsh environments.


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Polymer-derived SiBCN ceramic pressure sensor with excellent sensing performance

Show Author's information Gang SHAOa( )Junpeng JIANGaMingjie JIANGaJie SUaWen LIUa( )Hailong WANGaHongliang XUaHongxia LUaRui ZHANGa,b
School of Materials Science and Engineering, Zhengzhou University, Zhengzhou 450001, China
Provincial Key Laboratory of Aviation Materials and Application Technology, Zhengzhou University of Aeronautics, Zhengzhou 450046, China

Abstract

Pressure measurement with excellent stability and long time durability is highly desired, especially at high temperature and harsh environments. A polymer-derived silicoboron carbonitride (SiBCN) ceramic pressure sensor with excellent stability, accuracy, and repeatability is designed based on the giant piezoresistivity of SiBCN ceramics. The SiBCN ceramic sensor was packaged in a stainless steel case and tested using half Wheatstone bridge with the uniaxial pressure up to 10 MPa. The SiBCN ceramic showed a remarkable piezoresistive effect with the gauge factor (K) as high as 5500. The output voltage of packed SiBCN ceramic sensor changes monotonically and smoothly versus external pressure. The as received SiBCN pressure sensor possesses features of short response time, excellent repeatability, stability, sensitivity, and accuracy. Taking the excellent high temperature thermo-mechanical properties of polymer-derived SiBCN ceramics (e.g., high temperature stability, oxidation/corrosion resistance) into account, SiBCN ceramic sensor has significant potential for pressure measurement at high temperature and harsh environments.

Keywords:

polymer-derived ceramics (PDCs), silicoboron carbonitride (SiBCN) ceramic pressure sensor, piezoresistivity, high temperature and harsh environment sensor
Received: 27 January 2020 Revised: 04 March 2020 Accepted: 21 March 2020 Published: 05 June 2020 Issue date: June 2020
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Publication history
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Publication history

Received: 27 January 2020
Revised: 04 March 2020
Accepted: 21 March 2020
Published: 05 June 2020
Issue date: June 2020

Copyright

© The Author(s) 2020

Acknowledgements

The authors appreciate the financial support from the National Natural Science Foundation of China (No. U1904180) and Key Scientific Research Projects of High Education Institutions of Henan province (No. 19A430025).

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