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Research Article | Open Access

Crystallization and inter-diffusional behaviors in the formation of VO2(B) thin film with layered W-doping

Chuanshuo ZHANGaDongli HUa,b( )Hui GUa,bJuanjuan XINGa,bPing XIONGaDongyun WANaYanfeng GAOa
School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China
Materials Genome Institute, Shanghai University, Shanghai 200444, China
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Abstract

To achieve a better material for uncooled infrared (IR) detector, polycrystalline VO2(B) thin films with layered W-doping were fabricated on Si substrates by magnetron sputtering, and the best temperature coefficient of resistance (TCR) value reached -4.1%/K. The film synthesis was in a two-step route, first deposition at room temperature and then post-deposition annealing at 450 ℃, to better control the crystallization behavior. Various transmission electron microscopy (TEM) methods were employed to investigate three sets of multi-layered films with different deposition time, 10, 20, and 30 min, with especial emphasis on the effect of layered W-doping scheme on the formation of multiple VO2(B) layers. Spatial-resolved energy dispersive X-ray spectroscopy (EDS) revealed the alternative patterns of W-rich layers and W-poor layers, while the thinner films exhibited better crystallinity and texturing. By comparison with an as-deposited film, it was found that the inter-diffusion between the two types of layers was completed in the deposition step while both remained in amorphous structure. A stable W solution of about 8 cat% in VO2(B) layers measured from all these films indicated that the layered doping can tailor the multi-layered microstructure to optimize the performance of VO2(B) films.

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Journal of Advanced Ceramics
Pages 196-206
Cite this article:
ZHANG C, HU D, GU H, et al. Crystallization and inter-diffusional behaviors in the formation of VO2(B) thin film with layered W-doping. Journal of Advanced Ceramics, 2017, 6(3): 196-206. https://doi.org/10.1007/s40145-017-0231-7

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Received: 25 February 2017
Revised: 19 April 2017
Accepted: 13 May 2017
Published: 29 September 2017
© The author(s) 2017

Open Access The articles published in this journal are distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons. org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.

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