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Journal of Advanced Ceramics 2017, 6(1): 27-32 https://doi.org/10.1007/s40145-016-0213-1
Research Article | Open Access | Issue | Published: 02 March 2017

Oxidation mechanism of aluminum nitride revisited

Show Author's Information Chun-Ting YEH,  Wei-Hsing TUAN( )
Department of Materials Science and Engineering, “National Taiwan University”, Taipei, Taiwan 106, China
Keywords:
oxidation mechanism, aluminum nitride, diffusion, reaction
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YEH C-T, TUAN W-H. Oxidation mechanism of aluminum nitride revisited. Journal of Advanced Ceramics, 2017, 6(1): 27-32. https://doi.org/10.1007/s40145-016-0213-1
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Abstract Full text About this article

Different from the oxidation kinetics of other nitrides, the oxide layer on AlN can easily reach tens of micrometers at a temperature above 1200 ℃. In the present study, the oxidation mechanism of AlN is investigated through microstructure observation. The analysis indicates that the oxide layer is full of small pores. The formation of pores generates additional surface area to induce further reaction. The reaction thus controls the oxidation in the temperature range from 1050 to 1350 ℃. The oxidation rate becomes slow as the oxide layer reaches a critical thickness.


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About this article

Oxidation mechanism of aluminum nitride revisited

Show Author's information Chun-Ting YEH, Wei-Hsing TUAN( )
Department of Materials Science and Engineering, “National Taiwan University”, Taipei, Taiwan 106, China

Abstract

Different from the oxidation kinetics of other nitrides, the oxide layer on AlN can easily reach tens of micrometers at a temperature above 1200 ℃. In the present study, the oxidation mechanism of AlN is investigated through microstructure observation. The analysis indicates that the oxide layer is full of small pores. The formation of pores generates additional surface area to induce further reaction. The reaction thus controls the oxidation in the temperature range from 1050 to 1350 ℃. The oxidation rate becomes slow as the oxide layer reaches a critical thickness.

Keywords: oxidation mechanism, aluminum nitride, diffusion, reaction

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Publication history
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Publication history

Received: 08 September 2017
Revised: 10 May 2017
Accepted: 10 May 2018
Published: 02 March 2017
Issue date: March 2017

Copyright

© The author(s) 2016

Acknowledgements

The present study was supported by the “Ministry of Science and Technology” through the Contract No. NSC100-3113-E-002-001.

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Open Access The articles published in this journal are distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons. org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.

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