Abstract
Single phase of SrIrO3 powders and ceramics were obtained by solid-state chemical reaction method and spark plasma sintering (SPS) technique, respectively. Phase evolutions, characteristics, morphology and resistivity of the samples were studied by using thermogravimetric analysis–differential scanning calorimetry (TG–DSC), X-ray diffractometry (XRD), field emission scanning electron microscopy (FESEM) and four-point probe method, respectively. The results showed that the reaction process to form SrIrO3 phase occurred between SrCO3 and IrO2 directly during the heating process. By using optimum fabrication conditions established from the TG–DSC results, single phase of SrIrO3 powders was synthesized at 800–1000 ℃. SrIrO3 ceramics were sintered by SPS technique at 1000–1100 ℃ with a pressure of 30 MPa, showing a high relative density of 92%–96% and dense microstructure. The room-temperature resistivity of SrIrO3 ceramics was about 2×10-4 Ω•m. The present study can provide high-quality ceramic target for the preparation of SrIrO3 films in traditional physical vapor deposition (PVD) method.