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Research Article | Open Access

Polymer optimization for the development of low-cost moisture sensor based on nanoporous alumina thin film

Manju PANDEYaPrabhash MISHRAaDebdulal SAHAbS. S. ISLAMa,*( )
Nano-Sensor Research Laboratory, F/O Engineering and Technology, Jamia Millia Islamia (Central University), New Delhi, India
Sensors and Actuators Division, Central Glass & Ceramic Research Institute, 196 Raja S. C. Mullick Road, Kolkata 700032, India
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Sol–gel processed alumina (Al2O3) thin film has been investigated for sensing moisture. The sensor was based on ordered nanoporous Al2O3 thin film, which consisted of gold electrodes on both sides of the film forming parallel plate capacitor. Alumina substrate was used for supporting thin film moisture sensor. Hydrophilicity was achieved by controlling the surface energy of the substrate and polymer (polyvinyl alcohol (PVA)) optimization was done for developing rigid thin film over it. A high change in capacitance was observed as the moisture level increased from 5 ppmV to 500 ppmV. Scanning electron microscopy (SEM) results revealed that pores were distributed uniformly throughout the sample, which enhanced the adsorption of water molecule over the film. X-ray diffraction (XRD) study clearly confirmed the gamma (γ) phase of alumina thin film. It was found that the sensitivity of our sensor was suitable for commercial application.


Chen Y-T, Hsu W-T, Najafi K, et al. Vacuum packaging technology using localized aluminum/ silicon-to-glass bonding. J Microelectromech S 2002, 11: 556-565.
Harsányi G. Polymer Films in Sensors Applications. Budapest: Technomic Publishing Company, 1995.
Mistry KK, Saha D, Sengupta K. Sol–gel processed Al2O3 thick film template as sensitive capacitive trace moisture sensor. Sensor Actuat B: Chem 2005, 106: 258-262.
Bagwell RB, Messing GL. Critical factors in the production of sol–gel derived porous alumina. Key Eng Mat 1996, 115: 45-64.
Ecsedi Z. Synthesis of tailored porosity materials using the sol–gel method. Chem BullPOLITEHNICAUniv (Timişoara) 2007, 52: 14-17.
Yoldas BE. Alumina gels that form porous transparent Al2O3. J Mater Sci 1975, 10: 1856-1860.
Chatterjee S, Basu S, Chattopadhyay D, et al. Humidity sensor using porous tape cast alumina substrate. Rev Sci Instrum 2001, 72: 2792-2795.
Islam T, Mistry KK, Sengupta K, et al. Measurement of gas moisture in ppm range using porous silicon and porous alumina sensor. Sens Mater 2004, 16: 345-356.
Basu S, Saha M, Chatterjee S, et al. Porous ceramic sensor for measurement of gas moisture sensor in the ppm range. Mater Lett 2001, 49: 29-33.
Basu S, Chatterjee S, Saha M, et al. Study of electrical characteristics of porous alumina sensors for detection of low moisture in gases. Sensor Actuat B: Chem 2001, 79: 182-186.
Saha D, Das S, Sengupta K. Development of commercial nanoporous trace moisture sensor following sol–gel thin film technique. Sensor Actuat B: Chem 2008, 128: 383-387.
Adamczyk Z, Weroński P. Application of the DLVO theory for particle deposition problems. Adv Colloid Interfac 1999, 83: 137-226.
Pettersson A, Marino G, Pursiheimo A, et al. Electrosteric stabilization of Al2O3, ZrO2, and 3Y–ZrO2 suspensions: Effect of dissociation and type of polyelectrolyte. J Colloid Interface Sci 2000, 228: 73-81.
Pandey M, Tyagi K, Mishra P, et al. Nanoporous morphology of alumina films prepared by sol–gel dip coating method on alumina substrate. J Sol–Gel Sci Technol 2012, 64: 282-288.
Journal of Advanced Ceramics
Pages 341-346
Cite this article:
PANDEY M, MISHRA P, SAHA D, et al. Polymer optimization for the development of low-cost moisture sensor based on nanoporous alumina thin film. Journal of Advanced Ceramics, 2013, 2(4): 341-346.








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Received: 18 July 2013
Revised: 16 August 2013
Accepted: 26 August 2013
Published: 04 December 2013
© The author(s) 2013

Open Access: This article is distributed under the terms of the Creative Commons Attribution License which permits any use, distribution, and reproduction in any medium, provided the original author(s) and the source are credited.