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Research Article

Multifunctional high-performance pressure/proximity/temperature sensors enabled by hybrid resistive-supercapacitive response

Huijun Kong1,2, Zhongqian Song2( ), Meichun Ding1, Changxiang Shao1, Jiahui Yu1, Baolei Wang1, Weiyan Li2, Chenwei Li1( ), Li Niu3
School of Chemistry and Pharmaceutical Engineering, Shandong First Medical University and Shandong Academy of Medical Sciences, Jinan 250117, China
College of Artificial Intelligence and Big Data for Medical Sciences, Shandong First Medical University and Shandong Academy of Medical Sciences, Jinan 250117, China
School of Chemical Engineering and Technology, Sun Yat-sen University, Zhuhai 519082, China
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Abstract

The issue of sensitivity attenuation in high-pressure region has been a persistent concern for pressure-sensitive electronic skins. In order to tackle such trade-off between sensitivity and linear range, herein, a hybrid piezoresistive-supercapacitive (HRSC) strategy is proposed via introducing a piezoresistive porous aerogel layer between the charge collecting electrodes and iontronic films of the pressure sensors. Surprisingly, the HRSC-induced impedance regulation and supercapacitive behavior contribute to significant mitigation in sensitivity attenuation, achieving high sensitivity across wide linear range (44.58 kPa−1 from 0 to 3 kPa and 23.6 kPa−1 from 3 to 12 kPa). The HRSC pressure sensor exhibits a low detection limit of 1 Pa, fast responsiveness (~ 130 ms), and excellent cycling stability, allowing to detect tiny pressure of air flow, finger bending, and human respiration. Meanwhile, the HRSC sensor exhibits exceptional perception capabilities for proximity and temperature, broadening its application scenarios in prosthetic perception and electronic skin. The proposed HRSC strategy may boost the ongoing research on structural design of high-performance and multimodal electronic sensors.

Graphical Abstract

Hybrid resistive–supercapacitive mechanism is proposed to realize high sensitivity as well as wide linearity of pressure sensor. The hybrid piezoresistive-supercapacitive (HRSC) sensor exhibits multimodal perception capabilities for pressure/proximity/temperature parameters in contact/noncontact mode.

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Nano Research
Pages 5604-5613

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Cite this article:
Kong H, Song Z, Ding M, et al. Multifunctional high-performance pressure/proximity/temperature sensors enabled by hybrid resistive-supercapacitive response. Nano Research, 2024, 17(6): 5604-5613. https://doi.org/10.1007/s12274-024-6522-8
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Received: 07 December 2023
Revised: 18 January 2024
Accepted: 28 January 2024
Published: 13 March 2024
© Tsinghua University Press 2024