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Research Article

In-situ fabrication of on-chip 1T'-MoTe2/Ge Schottky junction photodetector for self-powered broadband infrared imaging and position sensing

Menglei Zhu1Kunxuan Liu2Di Wu1 ( )Yunrui Jiang2Xue Li1Pei Lin1Zhifeng Shi1Xinjian Li1Ran Ding3Yalun Tang2Xuechao Yu4Longhui Zeng1( )
School of Physics and Microelectronics, and Key Laboratory of Material Physics, Zhengzhou University, Zhengzhou 450052, China
Department of Electrical and Computer Engineering, University of California San Diego, La Jolla, CA 92093, USA
State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
Key Laboratory of Multifunctional Nanomaterials and Smart Systems, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China
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Abstract

High-sensitivity room-temperature multi-dimensional infrared (IR) detection is crucial for military and civilian purposes. Recently, the gapless electronic structures and unique optoelectrical properties have made the two-dimensional (2D) topological semimetals promising candidates for the realization of multifunctional optoelectronic devices. Here, we demonstrated the in-situ construction of high-performance 1T’-MoTe2/Ge Schottky junction device by inserting an ultrathin AlOx passivation layer. The good detection performance with an ultra-broadband detection wavelength range of up to 10.6 micron, an ultrafast response time of ~ 160 ns, and a large specific detectivity of over 109 Jones in mid-infrared (MIR) range surpasses that of most 2D materials-based IR sensors, approaching the performance of commercial IR photodiodes. The on-chip integrated device arrays with 64 functional detectors feature high-resolution imaging capability at room temperature. All these outstanding detection features have enabled the demonstration of position-sensitive detection applications. It demonstrates an exceptional position sensitivity of 14.9 mV/mm, an outstanding nonlinearity of 6.44%, and commendable trajectory tracking and optoelectronic demodulation capabilities. This study not only offers a promising route towards room-temperature MIR optoelectronic applications, but also demonstrates a great potential for application in optical sensing systems.

Graphical Abstract

A 1T’-MoTe2/Ge Schottky junction photodetector has been in-situ fabricated for high-sensitive broadband infrared detection, imaging and position sensing.

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Nano Research
Pages 5587-5594

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Cite this article:
Zhu M, Liu K, Wu D, et al. In-situ fabrication of on-chip 1T'-MoTe2/Ge Schottky junction photodetector for self-powered broadband infrared imaging and position sensing. Nano Research, 2024, 17(6): 5587-5594. https://doi.org/10.1007/s12274-024-6510-z
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Received: 23 December 2023
Revised: 11 January 2024
Accepted: 21 January 2024
Published: 29 February 2024
© Tsinghua University Press 2024