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Compared with piezoresistive sensors, pressure sensors based on the contact resistance effect are proven to have higher sensitivity and the ability to detect ultra-low pressure, thus attracting extensive research interest in wearable devices and artificial intelligence systems. However, most studies focus on static or low-frequency pressure detection, and there are few reports on high-frequency dynamic pressure detection. Limited by the viscoelasticity of polymers (necessary materials for traditional vibration sensors), the development of vibration sensors with high frequency response remains a great challenge. Here, we report a graphene aerogel-based vibration sensor with higher sensitivity and wider frequency response range (2 Hz–10 kHz) than both conventional piezoresistive and similar sensors. By modulating the microscopic morphology and mechanical properties, the super-elastic graphene aerogels suitable for vibration sensing have been prepared successfully. Meanwhile, the mechanism of the effect of density on the vibration sensor’s sensitivity is studied in detail. On this basis, the sensitivity, signal fidelity and signal-to-noise ratio of the sensor are further improved by optimizing the structure configuration. The developed sensor exhibits remarkable repeatability, excellent stability, high resolution (0.0039 g) and good linearity (non-linearity error < 0.8%) without hysteresis. As demos, the sensor can not only monitor low-frequency physiological signals and motion of the human body, but also respond to the high-frequency vibrations of rotating machines. In addition, the sensor can also detect static pressure. We expect the vibration sensor to meet a wider range of functional needs in wearable devices, smart robots, and industrial equipment.

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Publication history
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Acknowledgements

Publication history

Received: 11 April 2023
Revised: 29 April 2023
Accepted: 02 May 2023
Published: 14 June 2023
Issue date: August 2023

Copyright

© Tsinghua University Press 2023

Acknowledgements

Acknowledgements

This work was supported by the National Key R&D Program of China (Nos. 2018YFA0208402 and 2020YFA0714700), the National Natural Science Foundation of China (Nos. 52172060, 51820105002, 11634014 and 51372269). Prof. X. J. W. thanks Youth Innovation Promotion Association of the Chinese Academy of Sciences (No. 2020005), One Hundred Talent Project of Institute of Physics, CAS. Prof. H. P. L. and Prof. X. Z. thank support by the “One Hundred talents project” of CAS.

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