Central European Institute of Technology, Brno University of Technology, Purkyňova 123, 61200 Brno, Czech Republic
Faculty of Electrical Engineering and Communication, Brno University of Technology, Department of Microelectronics, Technická 3058/10, 61200 Brno, Czech Republic
Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), Campus UAB, Carrer dels Til·lers, Cerdanyola del Vallès, 08193 Barcelona, Spain
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Chemical Field-Effect transistors (ChemFET) gas nanosensor arrays based on single nanowires are developed using various fabrication steps, including e-beam lithography, aerosol-assisted chemical vapor deposition, and dielectrophoresis process. The structures integrate shielding alignment windows that ensure the integration of single nanowires into the ChemFET platform. The process is versatile, reproducible, and most likely adaptable to other sensing systems requiring single nanowire (SNW) arrays.
Abstract
This work focuses on the fabrication and characterization of Chemical Field-Effect Transistor (ChemFET) gas nanosensor arrays based on single nanowire (SNW). The fabrication processes include micro and nanofabrication techniques enabled by a combination of ultraviolet (UV) and e-beam lithography to build the ChemFET structure. Results show the integration and connection of SNWs across the multiple pairs of nanoelectrodes in the ChemFET by dielectrophoresis process (DEP) thanks to the incorporation of alignment windows (200–300 nm) adapted to the diameter of the NWs. Measurements of the SNW ChemFET array's output and transfer characteristics prove the influence of gate bias on the drain current regulation. Tests upon hydrogen (H2) and nitrogen dioxide (NO2) as analyte models of reducing and oxidizing gases show the ChemFET sensing functionality. Moreover, results demonstrate better response characteristics to H2 when the ChemFET operates in the subthreshold regime. The design concepts and methods proposed for fabricating the SNW-based ChemFET arrays are versatile, reproducible, and most likely adaptable to other systems where SNW arrays are required.
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Chmela O, Gablech I, Sadílek J, et al. ChemFET gas nanosensor arrays with alignment windows for assembly of single nanowires. Nano Research, 2023, 16(7): 10234-10244. https://doi.org/10.1007/s12274-023-5642-x
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