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Research Article

High-spatial-resolution composition analysis of micro/nanostructures with a nanoscale compositional variation

Meng Wang1,2,3,§, Xiaofeng Wang1,§, Zhican Zhou1,2, Feng Xia2,5, Haoran Zhang1,9, Artem Shelaev6,7, Xinzheng Zhang2( ), Chuanfei Guo4,8( ), Jingjun Xu2( ), Qian Liu1,2( )
Chinese Academy of Sciences (CAS) Key Laboratory of Nanosystem and Hierarchical Fabrication, CAS Center for Excellence in Nanoscience, National Center for Nanoscience and Technology & University of Chinese Academy of Sciences, Beijing 100190, China
The MOE Key Laboratory of Weak-Light Nonlinear Photonics, TEDA Applied Physics School, Nankai University, Tianjin 300457, China
Sino-German College of Intelligent Manufacturing, Shenzhen Technology University, Shenzhen 518118, China
Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen 518055, China
College of Physics, Qingdao University, Qingdao 26607, China
NT-MDT Co. Building 100, Zelenograd, Moscow 124482, Russia
Institute of Physics, Kazan Federal University, Kazan 420008, Russia
Guangdong Provincial Key Laboratory of Functional Oxide Materials and Devices, Southern University of Science and Technology, Shenzhen 518055, China
College of Material Science and Technology, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China

§ Meng Wang and Xiaofeng Wang contributed equally to this work.

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Graphical Abstract

A large-area composition analysis strategy for micro/nanostructures with a nanoscale compositional variation has been presented based on Raman mapping technology. This provides provides a new evaluation means for nanodevice property in mechnics, materials, and so on.

Abstract

The composition of materials in a micro-/nano-devices plays a key role in determining their mechanical, physical, and chemical properties. Especially, for devices with a compositional change on nanoscale which can often be achieved by point-by-point direct writing technology using a focused ion beam (FIB), electron beam (EB), or laser beam (LB), but so far, nanoscale composition analysis of a large-area micro/nano structures with a variation composition remains a big challenge in cost, simpleness, and flexibility. Here we present a feasible route to realize large-area composition analysis with nanoscale spatial resolution by using Raman spectroscopy. We experimentally verified the capability of this method by analyzing a complex Sn-SnOx system of a microscale grayscale mask with nanoscale spatial resolution of composition. Further analyses using Auger electron spectroscopy, transmission electron microscopy, and atomic force microscopy indicated the effectiveness and practicality of our method. This work opens up a way to analyze the composition of a large-area complex system at a nanoscale spatial resolution, and the method can be extended to many other material systems.

Keywords

Raman spectroscopynanoscale resolutioncomposition analysislarge-area

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Nano Research
Volume 16 Issue 1,
January 2023
Pages 1090-1095
DOI: 10.1007/s12274-022-4648-0
Cite this article:
Wang M, Wang X, Zhou Z, et al. High-spatial-resolution composition analysis of micro/nanostructures with a nanoscale compositional variation. Nano Research, 2023, 16(1): 1090-1095. https://doi.org/10.1007/s12274-022-4648-0
Topics:
Raman spectroscopy

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Received: 17 March 2022
Revised: 12 June 2022
Accepted: 13 June 2022
Published: 17 September 2022
© Tsinghua University Press 2022
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