AI Chat Paper
Note: Please note that the following content is generated by AMiner AI. SciOpen does not take any responsibility related to this content.
{{lang === 'zh_CN' ? '文章概述' : 'Summary'}}
{{lang === 'en_US' ? '中' : 'Eng'}}
Chat more with AI
Article Link
Collect
Submit Manuscript
Show Outline
Outline
Show full outline
Hide outline
Outline
Show full outline
Hide outline
Research Article

Direct synthesis of moiré superlattice through chemical vapor deposition growth of monolayer WS2 on plasma-treated HOPG

Xiaowen Zhou§Zongnan Zhang§Xinlong ZengYaping Wu( )Feiya XuChunmiao ZhangXu Li( )Zhiming Wu( )Junyong Kang
Department of Physics, Engineering Research Center for Micro-Nano Optoelectronic Materials and Devices at Education Ministry, OSED, Fujian Provincial Key Laboratory of Semiconductor Materials and Applications, Xiamen University, Xiamen 361005, China

§ Xiaowen Zhou and Zongnan Zhang contributed equally to this work.

Show Author Information

Graphical Abstract

The growth of complete monolayer WS2 on highly ordered pyrolytic graphite (HOPG) substrate is achieved by combining chemical vapor deposition (CVD) with plasma pretreatment, and the van der Waals (vdW) WS2/HOPG heterostructures exhibit diverse moiré superlattices with different twist angles, which provide great potential for exploring novel physical properties.

Abstract

Vertical van der Waals (vdW) heterostructures composed of two-dimensional (2D) layered materials have recently attracted substantial interests due to their unique properties. However, the direct synthesis of moiré superlattice remains a great challenge due to the difficulties in heterogeneous nucleation on smooth vdW surfaces. Here, we report a controllable chemical vapor deposition growth of complete monolayer WS2 on highly ordered pyrolytic graphite (HOPG) substrates through the plasma pretreatment. The results show that the morphologies of the grown WS2 have a strong dependence on the plasma parameters, including gas composition, source power, and treatment time. It is found that the surface C–C bonds are broken in the plasma pretreated HOPG, and the formed small clusters can act as the nucleation sites for the subsequent growth of WS2. Moreover, the height of clusters dominates the growth mode of WS2 islands. A transition from a 2D mode to three-dimensional (3D) growth mode occurs when the height is higher than the interlayer spacing of the heterostructure. Besides, diverse moiré superlattices with different twist angles for WS2/HOPG heterostructures are observed, and the formation mechanism is further analyzed by first-principles calculations.

Nano Research
Pages 8587-8594
Cite this article:
Zhou X, Zhang Z, Zeng X, et al. Direct synthesis of moiré superlattice through chemical vapor deposition growth of monolayer WS2 on plasma-treated HOPG. Nano Research, 2022, 15(9): 8587-8594. https://doi.org/10.1007/s12274-022-4487-z
Topics:

901

Views

4

Crossref

4

Web of Science

4

Scopus

0

CSCD

Altmetrics

Received: 24 February 2022
Revised: 28 April 2022
Accepted: 29 April 2022
Published: 08 July 2022
© Tsinghua University Press 2022
Return