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Nano Research 2022, 15(9): 8345-8350 https://doi.org/10.1007/s12274-022-4422-3
Research Article | Issue | Published: 31 May 2022

High resolution and high signal-to-noise ratio imaging with near-field high-order optical signals

Show Author's Information Fei Wang1,2,  Shuming Yang1,2( ),  Shaobo Li1,2,  Shuhao Zhao1,2,  Biyao Cheng1,2,  Chengsheng Xia1,2
State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi’an Jiaotong University, Xi’an 710049, China
School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Keywords:
high resolution, optical probe, high-order optical signal, local electric field enhancement
Topics:
Near field scanning optical microscopy
Cite this article:
Wang F, Yang S, Li S, et al. High resolution and high signal-to-noise ratio imaging with near-field high-order optical signals. Nano Research, 2022, 15(9): 8345-8350. https://doi.org/10.1007/s12274-022-4422-3
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Abstract Full text Electronic supplementary material About this article

The properties of near-field optics have always been the focus of nano-measurement technology. The 11th order effective near-field optical signal with an incident laser wavelength of 1,550 nm is obtained using a platinum-coated optical probe (Pt–Si probe). The experimental results show that the local electric field intensity of the Pt–Si probe is nearly 30 times higher than that of silicon probe (Si probe). Therefore, the highest 7th order near-field optical imaging results are obtained with the Pt–Si probe. Further, near-field optical imaging is performed on samples such as gold grids and carbon nanotubes using the Pt–Si probe. The measurement results show that the high-order signal has the characteristics of less background, higher signal-to-noise ratio, and resolution up to 5.7 nm.


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Electronic supplementary material
About this article

High resolution and high signal-to-noise ratio imaging with near-field high-order optical signals

Show Author's information Fei Wang1,2, Shuming Yang1,2( ), Shaobo Li1,2, Shuhao Zhao1,2, Biyao Cheng1,2, Chengsheng Xia1,2
State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi’an Jiaotong University, Xi’an 710049, China
School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China

Abstract

The properties of near-field optics have always been the focus of nano-measurement technology. The 11th order effective near-field optical signal with an incident laser wavelength of 1,550 nm is obtained using a platinum-coated optical probe (Pt–Si probe). The experimental results show that the local electric field intensity of the Pt–Si probe is nearly 30 times higher than that of silicon probe (Si probe). Therefore, the highest 7th order near-field optical imaging results are obtained with the Pt–Si probe. Further, near-field optical imaging is performed on samples such as gold grids and carbon nanotubes using the Pt–Si probe. The measurement results show that the high-order signal has the characteristics of less background, higher signal-to-noise ratio, and resolution up to 5.7 nm.

Keywords: high resolution, optical probe, high-order optical signal, local electric field enhancement

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Publication history
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Acknowledgements

Publication history

Received: 16 February 2022
Revised: 11 April 2022
Accepted: 12 April 2022
Published: 31 May 2022
Issue date: September 2022

Copyright

© Tsinghua University Press 2022

Acknowledgements

Acknowledgements

The authors would like to acknowledge the National Key Research and Development Program of China (No. 2021YFF0700402), the Program for Science and Technology Innovation Group of Shaanxi Province (No. 2019TD-011), the Key Research and Development Program of Shaanxi Province (No. 2020DLGY04-02), and the Fundamental Research Funds for the Central Universities for their support.

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