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Nano Research 2022, 15(8): 7484-7491 https://doi.org/10.1007/s12274-022-4363-x
Research Article | Issue | Published: 24 May 2022

Flexible triboelectric nanogenerator toward ultrahigh-frequency vibration sensing

Show Author's Information Zhiwei Lin1,§,  Chenchen Sun1,§,  Gaoqiang Zhang1,  Endong Fan1,  Zhihao Zhou1,  Ziying Shen1,  Jun Yang2,  Mingyang Liu1,  Yushu Xia1,  Shaobo Si1,  Jin Yang1( )
Key Laboratory of Optoelectronic Technology & Systems (Ministry of Education), Department of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China
Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China

§ Zhiwei Lin and Chenchen Sun contributed equally to this work.

Keywords:
flexible electronics, self-powered sensor, vibration sensing, structural health monitoring
Topics:
Nanosensors
Cite this article:
Lin Z, Sun C, Zhang G, et al. Flexible triboelectric nanogenerator toward ultrahigh-frequency vibration sensing. Nano Research, 2022, 15(8): 7484-7491. https://doi.org/10.1007/s12274-022-4363-x
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Abstract Full text Electronic supplementary material About this article

Flexible high-frequency vibration sensors are highly desirable in various real-world applications such as structural health monitoring, environmental monitoring, and the internet of things. However, developing a facile and effective method to fabricate vibration sensors simultaneously featuring high vibration frequency response-ability and flexibility remains a grand challenge. Herein, we report a flexible ultrahigh-frequency triboelectric vibration sensor (UTVS) prepared by a layer-particle-layer structure. Owing to the flexibility of the materials (i.e., polyethylene terephthalate membrane) and the ultrahigh-frequency vibration response-ability of internal microparticles, the flexible UTVS exhibits an enhanced working frequency range of 3–170 kHz, which is much broader than previously reported triboelectric vibration sensors. Moreover, the UTVS can work not only in a flat state but also in a bent state due to its flexibility and the unique layer-particle-layer structural design. The UTVS shows nanometer-level vibration response-ability, omnidirectional response, stability in the temperature range of 10–70 °C, good frequency resolution of 0.01 kHz, and excellent performance in burst vibration detection (e.g., pencil lead break events and impact events from falling steel balls). With a collection of compelling features, the device is successfully demonstrated in vibration monitoring of curved structures (e.g., real-time water pipeline leak monitoring). Such a flexible ultrahigh-frequency triboelectric vibration sensor holds great potential in a wide range of practical applications, such as communication, health care, and infrastructure monitoring.


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About this article

Flexible triboelectric nanogenerator toward ultrahigh-frequency vibration sensing

Show Author's information Zhiwei Lin1,§, Chenchen Sun1,§, Gaoqiang Zhang1, Endong Fan1, Zhihao Zhou1, Ziying Shen1, Jun Yang2, Mingyang Liu1, Yushu Xia1, Shaobo Si1, Jin Yang1( )
Key Laboratory of Optoelectronic Technology & Systems (Ministry of Education), Department of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China
Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China

§ Zhiwei Lin and Chenchen Sun contributed equally to this work.

Abstract

Flexible high-frequency vibration sensors are highly desirable in various real-world applications such as structural health monitoring, environmental monitoring, and the internet of things. However, developing a facile and effective method to fabricate vibration sensors simultaneously featuring high vibration frequency response-ability and flexibility remains a grand challenge. Herein, we report a flexible ultrahigh-frequency triboelectric vibration sensor (UTVS) prepared by a layer-particle-layer structure. Owing to the flexibility of the materials (i.e., polyethylene terephthalate membrane) and the ultrahigh-frequency vibration response-ability of internal microparticles, the flexible UTVS exhibits an enhanced working frequency range of 3–170 kHz, which is much broader than previously reported triboelectric vibration sensors. Moreover, the UTVS can work not only in a flat state but also in a bent state due to its flexibility and the unique layer-particle-layer structural design. The UTVS shows nanometer-level vibration response-ability, omnidirectional response, stability in the temperature range of 10–70 °C, good frequency resolution of 0.01 kHz, and excellent performance in burst vibration detection (e.g., pencil lead break events and impact events from falling steel balls). With a collection of compelling features, the device is successfully demonstrated in vibration monitoring of curved structures (e.g., real-time water pipeline leak monitoring). Such a flexible ultrahigh-frequency triboelectric vibration sensor holds great potential in a wide range of practical applications, such as communication, health care, and infrastructure monitoring.

Keywords: flexible electronics, self-powered sensor, vibration sensing, structural health monitoring

References(51)

1

Awwad, A.; Yahyia, M.; Albasha, L.; Mortula, M. M.; Ali, T. Communication network for ultrasonic acoustic water leakage detectors. IEEE Access 2020, 8, 29954–29964.
DOI Google Scholar
2

Rostami, J.; Tse, P. W.; Yuan, M. D. Detection of broken wires in elevator wire ropes with ultrasonic guided waves and tone-burst wavelet. Struct. Health Monit. 2020, 19, 481–494.
DOI Google Scholar
3
Frederick, W. Substation insulator failure prevention by ultrasonic corona detection. IEEE Trans. Ind. Appl. 1972, IA-8, 82–83.
4

Swan, M. Sensor mania! The internet of things, wearable computing, objective metrics, and the quantified Self 2. 0. J. Sens. Actuator Netw. 2012, 1, 217–253.
DOI Google Scholar
5

Dixon, N.; Smith, A.; Flint, J. A.; Khanna, R.; Clark, B.; Andjelkovic, M. An acoustic emission landslide early warning system for communities in low-income and middle-income countries. Landslides 2018, 15, 1631–1644.
DOI Google Scholar
6

Michlmayr, G.; Chalari, A.; Clarke, A.; Or, D. Fiber-optic high-resolution acoustic emission (AE) monitoring of slope failure. Landslides 2017, 14, 1139–1146.
DOI Google Scholar
7

Chen, X.; Li, J. W.; Zhang, G. T.; Shi, Y. PZT nanoactive fiber composites for acoustic emission detection. Adv. Mater. 2011, 23, 3965–3969.
DOI Google Scholar
8

Lang, C. H.; Fang, J.; Shao, H.; Ding, X.; Lin, T. High-sensitivity acoustic sensors from nanofibre webs. Nat. Commun. 2016, 7, 11108.
DOI Google Scholar
9

Lee, H. S.; Chung, J.; Hwang, G. T.; Jeong, C. K.; Jung, Y.; Kwak, J. H.; Kang, H. M.; Byun, M.; Kim, W. D.; Hur, S. et al. Flexible inorganic piezoelectric acoustic nanosensors for biomimetic artificial hair cells. Adv. Funct. Mater. 2014, 24, 6914–6921.
DOI Google Scholar
10

Zhou, L. Y.; He, J. Q.; Li, W. Z.; He, P. S.; Ye, Q. X.; Fu, B. W.; Tao, P.; Song, C. Y.; Wu, J. B.; Deng, T. et al. Butterfly wing hears sound: Acoustic detection using biophotonic nanostructure. Nano Lett. 2019, 19, 2627–2633.
DOI Google Scholar
11

Rothberg, S. J.; Allen, M. S.; Castellini, P.; Di Maio, D.; Dirckx, J. J. J.; Ewins, D. J.; Halkon, B. J.; Muyshondt, P.; Paone, N.; Ryan, T. et al. An international review of laser Doppler vibrometry: Making light work of vibration measurement. Opt. Lasers Eng. 2017, 99, 11–22.
DOI Google Scholar
12

Oralkan, O.; Ergun, A. S.; Johnson, J. A.; Karaman, M.; Demirci, U.; Kaviani, K.; Lee, T. H.; Khuri-Yakub, B. T. Capacitive micromachined ultrasonic transducers: Next-generation arrays for acoustic imaging. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 2002, 49, 1596–1610.
DOI Google Scholar
13

Lee, S.; Kim, J.; Yun, I.; Bae, G. Y.; Kim, D.; Park, S.; Yi, I. M.; Moon, W.; Chung, Y.; Cho, K. An ultrathin conformable vibration-responsive electronic skin for quantitative vocal recognition. Nat. Commun. 2019, 10, 2468.
DOI Google Scholar
14

Cong, M.; Wu, X. J.; Qian, C. Q. A longitudinal mode electromagnetic acoustic transducer (EMAT) based on a permanent magnet chain for pipe inspection. Sensors 2016, 16, 740.
DOI Google Scholar
15

Kang, L.; Feeney, A.; Dixon, S. Wideband electromagnetic dynamic acoustic transducers (WEMDATs) for air-coupled ultrasonic applications. Appl. Phys. Lett. 2019, 114, 053505.
DOI Google Scholar
16

Zhao, Y. C.; Gao, S. H.; Zhang, X.; Huo, W. X.; Xu, H.; Chen, C.; Li, J.; Xu, K. X.; Huang, X. Fully flexible electromagnetic vibration sensors with annular field confinement origami magnetic membranes. Adv. Funct. Mater. 2020, 30, 2001553.
DOI Google Scholar
17
Yan, S. ; Liu, W. L. ; Song, G. B. ; Zhao, P. T. ; Zhang, S. Connection looseness detection of steel grid structures using piezoceramic transducers. Int. J. Distrib. Sens. Netw. 2018, 14, 1550147718759234.
18

Xu, Y.; Luo, M. Z.; Liu, Q.; Du, G. F.; Song, G. B. PZT transducer array enabled pipeline defect locating based on time-reversal method and matching pursuit de-noising. Smart Mater. Struct. 2019, 28, 075019.
DOI Google Scholar
19

Du, G. F.; Kong, Q. Z.; Lai, T.; Song, G. B. Feasibility study on crack detection of pipelines using piezoceramic transducers. Int. J. Distrib. Sens. Netw. 2013, 9, 631715.
DOI Google Scholar
20

Cheng, L. Q.; Xu, Z.; Zhao, C. L.; Thong, H. C.; Cen, Z. Y.; Lu, W.; Lan, Y.; Wang, K. Significantly improved piezoelectric performance of PZT-PMnN ceramics prepared by spark plasma sintering. RSC Adv. 2018, 8, 35594–35599.
DOI Google Scholar
21

Hu, H. J.; Zhu, X.; Wang, C. H.; Zhang, L.; Li, X. S.; Lee, S.; Huang, Z. L.; Chen, R. M.; Chen, Z. Y.; Wang, C. F. et al. Stretchable ultrasonic transducer arrays for three-dimensional imaging on complex surfaces. Sci. Adv. 2018, 4, eaar3979.
DOI Google Scholar
22

Wang, C. H.; Li, X. S.; Hu, H. J.; Zhang, L.; Huang, Z. L.; Lin, M. Y.; Zhang, Z. R.; Yin, Z. N.; Huang, B.; Gong, H. et al. Monitoring of the central blood pressure waveform via a conformal ultrasonic device. Nat. Biomed. Eng. 2018, 2, 687–695.
DOI Google Scholar
23

Loke, G.; Alain, J.; Yan, W.; Khudiyev, T.; Noel, G.; Yuan, R.; Missakian, A.; Fink, Y. Computing fabrics. Matter 2020, 2, 786–788.
DOI Google Scholar
24

Yan, W.; Page, A.; Nguyen-Dang, T.; Qu, Y. P.; Sordo, F.; Wei, L.; Sorin, F. Advanced multimaterial electronic and optoelectronic fibers and textiles. Adv. Mater. 2019, 31, 1802348.
DOI Google Scholar
25

Loke, G.; Yan, W.; Khudiyev, T.; Noel, G.; Fink, Y. Recent progress and perspectives of thermally drawn multimaterial fiber electronics. Adv. Mater. 2020, 32, 1904911.
DOI Google Scholar
26

Fan, F. R.; Tian, Z. Q.; Wang, Z. L. Flexible triboelectric generator. Nano Energy 2012, 1, 328–334.
DOI Google Scholar
27

Quan, T.; Wu, Y. C.; Yang, Y. Hybrid electromagnetic-triboelectric nanogenerator for harvesting vibration energy. Nano Res. 2015, 8, 3272–3280.
DOI Google Scholar
28

Li, G. Z.; Wang, G. G.; Cai, Y. W.; Sun, N.; Li, F.; Zhou, H. L.; Zhao, H. X.; Zhang, X. N.; Han, J. C.; Yang, Y. A high-performance transparent and flexible triboelectric nanogenerator based on hydrophobic composite films. Nano Energy 2020, 75, 104918.
DOI Google Scholar
29

Wang, S. H.; Lin, L.; Wang, Z. L. Triboelectric nanogenerators as self-powered active sensors. Nano Energy 2015, 11, 436–462.
DOI Google Scholar
30

Wang, Z. L.; Chen, J.; Lin, L. Progress in triboelectric nanogenerators as a new energy technology and self-powered sensors. Energy Environ. Sci. 2015, 8, 2250–2282.
DOI Google Scholar
31

Xu, W. H.; Zheng, H. X.; Liu, Y.; Zhou, X. F.; Zhang, C.; Song, Y. X.; Deng, X.; Leung, M.; Yang, Z. B.; Xu, R. X. et al. A droplet-based electricity generator with high instantaneous power density. Nature 2020, 578, 392–396.
DOI Google Scholar
32

Hinchet, R.; Yoon, H. J.; Ryu, H.; Kim, M. K.; Choi, E. K.; Kim, D. S.; Kim, S. W. Transcutaneous ultrasound energy harvesting using capacitive triboelectric technology. Science 2019, 365, 491–494.
DOI Google Scholar
33

Chen, C.; Wen, Z.; Shi, J. H.; Jian, X. H.; Li, P. Y.; Yeow, J. T. W.; Sun, X. H. Micro triboelectric ultrasonic device for acoustic energy transfer and signal communication. Nat. Commun. 2020, 11, 4143.
DOI Google Scholar
34

Sun, J. G.; Tu, K. K.; Büchele, S.; Koch, S. M.; Ding, Y.; Ramakrishna, S. N.; Stucki, S.; Guo, H. Y.; Wu, C. S.; Keplinger, T. et al. Functionalized wood with tunable tribopolarity for efficient triboelectric nanogenerators. Matter 2021, 4, 3049–3066.
DOI Google Scholar
35

Xu, C. H.; Yang, Y. R.; Gao, W. Skin-interfaced sensors in digital medicine: From materials to applications. Matter 2020, 2, 1414–1445.
DOI Google Scholar
36

Yang, W. Q.; Chen, J.; Zhu, G.; Wen, X. N.; Bai, P.; Su, Y. J.; Lin, Y.; Wang, Z. L. Harvesting vibration energy by a triple-cantilever based triboelectric nanogenerator. Nano Res. 2013, 6, 880–886.
DOI Google Scholar
37

Wang, L. L.; Liu, W. Q.; Yan, Z. G.; Wang, F. J.; Wang, X. Stretchable and shape-adaptable triboelectric nanogenerator based on biocompatible liquid electrolyte for biomechanical energy harvesting and wearable human-machine interaction. Adv. Funct. Mater. 2021, 31, 2007221.
DOI Google Scholar
38

Liu, W. Q.; Wang, X.; Song, Y. X.; Cao, R. R.; Wang, L. L.; Yan, Z. G.; Shan, G. Y. Self-powered forest fire alarm system based on impedance matching effect between triboelectric nanogenerator and thermosensitive sensor. Nano Energy 2020, 73, 104843.
DOI Google Scholar
39

Yan, Z. G.; Wang, L. L.; Xia, Y. F.; Qiu, R. D.; Liu, W. Q.; Wu, M.; Zhu, Y.; Zhu, S. L.; Jia, C. Y.; Zhu, M. M. et al. Flexible high-resolution triboelectric sensor array based on patterned laser-induced graphene for self-powered real-time tactile sensing. Adv. Funct. Mater. 2021, 31, 2100709.
DOI Google Scholar
40

Wu, M.; Wang, X.; Xia, Y. F.; Zhu, Y.; Zhu, S. L.; Jia, C. Y.; Guo, W. Y.; Li, Q. Q.; Yan, Z. G. Stretchable freezing-tolerant triboelectric nanogenerator and strain sensor based on transparent, long-term stable, and highly conductive gelatin-based organohydrogel. Nano Energy 2022, 95, 106967.
DOI Google Scholar
41

Jin, L.; Xiao, X.; Deng, W. L.; Nashalian, A.; He, D. R.; Raveendran, V.; Yan, C.; Su, H.; Chu, X.; Yang, T. et al. Manipulating relative permittivity for high-performance wearable triboelectric nanogenerators. Nano Lett. 2020, 20, 6404–6411.
DOI Google Scholar
42

Wang, Z. L. On Maxwell's displacement current for energy and sensors: The origin of nanogenerators. Mater. Today 2017, 20, 74–82.
DOI Google Scholar
43

Zi, Y. L.; Guo, H. Y.; Wen, Z.; Yeh, M. H.; Hu, C. G.; Wang, Z. L. Harvesting low-frequency (< 5 Hz) irregular mechanical energy: A possible killer application of triboelectric nanogenerator.ACS Nano 2016, 10, 4797–4805.
DOI
44

Yu, A. F.; Song, M.; Zhang, Y.; Zhang, Y.; Chen, L. B.; Zhai, J. Y.; Wang, Z. L. Self-powered acoustic source locator in underwater environment based on organic film triboelectric nanogenerator. Nano Res. 2015, 8, 765–773.
DOI Google Scholar
45

Fan, X.; Chen, J.; Yang, J.; Bai, P.; Li, Z. L.; Wang, Z. L. Ultrathin, rollable, paper-based triboelectric nanogenerator for acoustic energy harvesting and self-powered sound recording. ACS Nano 2015, 9, 4236–4243.
DOI Google Scholar
46

Yang, J.; Chen, J.; Liu, Y.; Yang, W. Q.; Su, Y. J.; Wang, Z. L. Triboelectrification-based organic film nanogenerator for acoustic energy harvesting and self-powered active acoustic sensing. ACS Nano 2014, 8, 2649–2657.
DOI Google Scholar
47

Jang, J.; Lee, J. W.; Jang, J. H.; Choi, H. A triboelectric-based artificial basilar membrane to mimic cochlear tonotopy. Adv. Healthc. Mater. 2016, 5, 2481–2487.
DOI Google Scholar
48

Guo, H. Y.; Pu, X. J.; Chen, J.; Meng, Y.; Yeh, M. H.; Liu, G. L.; Tang, Q.; Chen, B. D.; Liu, D.; Qi, S. et al. A highly sensitive, self-powered triboelectric auditory sensor for social robotics and hearing aids. Sci. Robot. 2018, 3, eaat2516.
DOI Google Scholar
49

Kang, S.; Cho, S.; Shanker, R.; Lee, H.; Park, J.; Um, D. S.; Lee, Y.; Ko, H. Transparent and conductive nanomembranes with orthogonal silver nanowire arrays for skin-attachable loudspeakers and microphones. Sci. Adv. 2018, 4, eaas8772.
DOI Google Scholar
50

de Almeida, V. A. D.; Baptista, F. G.; de Aguiar, P. R. Piezoelectric transducers assessed by the pencil lead break for impedance-based structural health monitoring. IEEE Sens. J. 2015, 15, 693–702.
DOI Google Scholar
51

Li, R.; Huang, H. D.; Xin, K. L.; Tao, T. A review of methods for burst/leakage detection and location in water distribution systems. Water Supply 2015, 15, 429–441.
DOI Google Scholar
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Publication history
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Acknowledgements

Publication history

Received: 24 January 2022
Revised: 10 March 2022
Accepted: 27 March 2022
Published: 24 May 2022
Issue date: August 2022

Copyright

© Tsinghua University Press 2022

Acknowledgements

Acknowledgements

J. Y. acknowledges support from the National Natural Science Foundation of China (No. 51675069), the Scientific and Technological Research Program of Chongqing Municipal Education Commission (No. KJ1703047), the Fundamental Research Funds for the Central Universities (Nos. 2018CDQYGD0020 and cqu2018CDHB1A05), and the Natural Science Foundation Projects of Chongqing (Nos. cstc2017shmsA40018 and cstc2018jcyjAX0076). Z. W. L. would like to thank the China Scholarship Council (No. 201806050157) for its financial support.

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