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Research Article

Direct stamping multifunctional tactile sensor for pressure and temperature sensing

Binghao Liang1,§Bingfang Huang1,§Junkai He1Rongliang Yang1Chengchun Zhao1Bo-Ru Yang1( )Anyuan Cao2Zikang Tang3Xuchun Gui1( )
State Key Laboratory of Optoelectronic Materials and Technologies, School of Electronics and Information Technology, Sun Yat-sen University, Guangzhou 510275, China
Department of Materials Science and Engineering, College of Engineering, Peking University, Beijing 100871, China
Institute of Applied Physics and Materials Engineering, University of Macau, Avenida da Universidade, Taipa, Macau, China

§ Binghao Liang and Bingfang Huang contributed equally to this work.

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Abstract

Flexible and wearable sensors have broad application prospects in health monitoring and artificial intelligence. Many different single-functional sensing devices have been developed in recent years, such as pressure sensors and temperature sensors. However, it is still a great challenge to design and fabricate tactile sensors with multiple sensing functions. Herein, we propose a simple direct stamping method for the fabrication of multifunctional tactile sensors. It can detect pressure and temperature stimuli signals simultaneously. This pressure/temperature sensor possesses high sensitivity (0.67 kPa−1), large linear range (0.75–5 kPa), and fast response speed (15.6 ms) in pressure sensing. It also has a high temperature sensitivity (1.41%/°C) and great linearity (0.99) for temperature sensing in the range of −30 to 30 °C. All these excellent performances indicate that this pressure/temperature sensor has great potential in applications for artificial intelligence and health monitoring.

Graphical Abstract

A multifunctional pressure/temperature tactile sensor was designed and fabricated by a versatile dry transfer method. The sensor possesses high sensitivity (0.67 kPa−1), large linear range (0.75–5 kPa), fast response speed (15.6 ms) in pressure sensing, and a high temperature sensitivity (1.41%/°C) in temperature sensing.

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Nano Research
Pages 3614-3620

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Cite this article:
Liang B, Huang B, He J, et al. Direct stamping multifunctional tactile sensor for pressure and temperature sensing. Nano Research, 2022, 15(4): 3614-3620. https://doi.org/10.1007/s12274-021-3906-x
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Received: 24 July 2021
Revised: 22 September 2021
Accepted: 26 September 2021
Published: 24 October 2021
© Tsinghua University Press and Springer-Verlag GmbH Germany, part of Springer Nature 2021