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Nano Research 2022, 15(3): 2608-2615 https://doi.org/10.1007/s12274-021-3825-x
Research Article | Issue | Published: 04 September 2021

Growth of centimeter scale Nb1−xWxSe2 monolayer film by promoter assisted liquid phase chemical vapor deposition

Show Author's Information Boxing An1,§,  Yang Ma1,2,§,  Feihong Chu1,§,  Xuhong Li3,  Yi Wu1,  Congya You1,  Wenjie Deng1,  Songyu Li3,  Yongzhe Zhang1,2( )
Key Laboratory of Advanced Functional Materials, Ministry of Education, College of Materials Science and Engineering, Beijing University of Technology, Beijing 100124, China
Key Laboratory of Optoelectronics Technology of Education Ministry of China, Faculty of Information Technology, Beijing University of Technology, Beijing 100124, China
School of Physics, Beihang University, Beijing 100191, China

§Boxing An, Yang Ma, and Feihong Chu contributed equally to this work.

Keywords:
centimeter scale, Nb1−xWxSe2, promoter assisted, liquid phase chemical vapor deposition
Topics:
Thin films
Cite this article:
An B, Ma Y, Chu F, et al. Growth of centimeter scale Nb1−xWxSe2 monolayer film by promoter assisted liquid phase chemical vapor deposition. Nano Research, 2022, 15(3): 2608-2615. https://doi.org/10.1007/s12274-021-3825-x
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Abstract Full text About this article

Two-dimensional (2D) transition-metal dichalcogenide materials (TMDs) alloys have a wide range of applications in the field of optoelectronics due to their capacity to achieve wide modulation of the band gap with fully tunable compositions. However, it is still a challenge for growing alloys with uniform components and large lateral size due to the random distribution of the crystal nucleus locations. Here, we applied a simple but effective promoter assisted liquid phase chemical vapor deposition (CVD) method, in which the quantity ratio of promoter to metal precursor can be controlled precisely, leading to tiny amounts of transition metal oxide precursors deposition onto the substrates in a highly uniform and reproducible manner, which can effectively control the uniform distribution of element components and nucleation sites. By this method, a series of monolayer Nb1−xWxSe2 alloy films with fully tunable compositions and centimeter scale have been successfully synthesized on sapphire substrates. This controllable approach opens a new way to produce large area and uniform 2D alloy film, which has the potential for the construction of optoelectronic devices with tailored spectral responses.


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About this article

Growth of centimeter scale Nb1−xWxSe2 monolayer film by promoter assisted liquid phase chemical vapor deposition

Show Author's information Boxing An1,§, Yang Ma1,2,§, Feihong Chu1,§, Xuhong Li3, Yi Wu1, Congya You1, Wenjie Deng1, Songyu Li3, Yongzhe Zhang1,2( )
Key Laboratory of Advanced Functional Materials, Ministry of Education, College of Materials Science and Engineering, Beijing University of Technology, Beijing 100124, China
Key Laboratory of Optoelectronics Technology of Education Ministry of China, Faculty of Information Technology, Beijing University of Technology, Beijing 100124, China
School of Physics, Beihang University, Beijing 100191, China

§Boxing An, Yang Ma, and Feihong Chu contributed equally to this work.

Abstract

Two-dimensional (2D) transition-metal dichalcogenide materials (TMDs) alloys have a wide range of applications in the field of optoelectronics due to their capacity to achieve wide modulation of the band gap with fully tunable compositions. However, it is still a challenge for growing alloys with uniform components and large lateral size due to the random distribution of the crystal nucleus locations. Here, we applied a simple but effective promoter assisted liquid phase chemical vapor deposition (CVD) method, in which the quantity ratio of promoter to metal precursor can be controlled precisely, leading to tiny amounts of transition metal oxide precursors deposition onto the substrates in a highly uniform and reproducible manner, which can effectively control the uniform distribution of element components and nucleation sites. By this method, a series of monolayer Nb1−xWxSe2 alloy films with fully tunable compositions and centimeter scale have been successfully synthesized on sapphire substrates. This controllable approach opens a new way to produce large area and uniform 2D alloy film, which has the potential for the construction of optoelectronic devices with tailored spectral responses.

Keywords: centimeter scale, Nb1−xWxSe2, promoter assisted, liquid phase chemical vapor deposition

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Publication history
Copyright
Acknowledgements

Publication history

Received: 22 July 2021
Revised: 10 August 2021
Accepted: 15 August 2021
Published: 04 September 2021
Issue date: March 2022

Copyright

© Tsinghua University Press and Springer-Verlag GmbH Germany, part of Springer Nature 2021

Acknowledgements

Acknowledgements

This work was supported by the National Science Foundation of China (Nos. 61922005 and U1930105), the Beijing Municipal Natural Science Foundation (No. JQ20027). The National Natural Science Foundation of China (No. 62005003). The General Program of Science and Technology Development Project of Beijing Municipal Education Commission (No. KM202110005008). The Basic Research Foundation of Beijing University of Technology (No. 048000546320504).

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