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In this work, the surface modification using a two-steps plasma etching has been developed for enhancing energy conversion performance in polytetrafluoroethylene (PTFE) triboelectric nanogenerator (TENG). Enhancing surface area by a powerful O2 and Ar bipolar pulse plasma etching without the use of CF4 gas has been demonstrated for the first time. TENG with modified surface PTFE using a sequential two-step O2/Ar plasma has a superior power density of 9.9 W⋅m−2, which is almost thirty times higher than that of a pristine PTFE TENG. The synergistic combination of high surface area and charge trapping sites due to chemical bond defects achieved from the use of a sequential O2/Ar plasma gives rise to the intensified triboelectric charge density and the enhancement of power output of PTFE-based TENG. The effects of plasma species and plasma etching sequence on surface morphologies and surface chemical species were investigated by a field emission scanning electron microscopy (FESEM), atomic force microscopy (AFM), and X-ray photoelectron spectroscopy (XPS). The correlation of surface morphology, chemical structure, and TENG performance was elucidated. In addition, the applications of mechanical energy harvesting for lighting, charging capacitors, keyboard sensing and operating a portable calculator were demonstrated.

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Publication history
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Publication history

Received: 19 December 2020
Revised: 24 March 2021
Accepted: 25 March 2021
Published: 12 May 2021
Issue date: January 2022

Copyright

© Tsinghua University Press and Springer-Verlag GmbH Germany, part of Springer Nature 2021

Acknowledgements

Acknowledgements

This work was supported by the RNN program of the NANOTEC, NSTDA, Ministry of Higher Education, Science, Research and Innovation (MHESI) and Khon Kaen University, Thailand, the Thailand Research Fund (No. MRG6280196), the Thailand Center of Excellence in Physics (ThEP), and the Basic Research Fund of Khon Kaen University.

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Reprints and Permission requests may be sought directly from editorial office.
Email: nanores@tup.tsinghua.edu.cn

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